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Vibration-excitation-vibration-absorption traveling wave guide microfluid delivery device

A microfluidic and traveling wave technology, applied in liquid variable volume machinery, pumps with flexible working elements, machines/engines, etc., can solve the problem of fluid and pipe wall materials, physical and chemical properties that are only applicable to a certain range. Sensitivity and other issues, to achieve the effect of improving thermal diffusion efficiency, high integration, and simple control methods

Inactive Publication Date: 2016-09-07
JILIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But there are also certain limitations. It is sensitive to the physical and chemical properties of the pipe wall material and the driven fluid, so it can only be applied to a certain range of fluids and pipe wall materials; Free charges are induced in the neutral or fluid-solid interface, and the microfluidics are driven by the driving force generated by the interaction of the electric field and the free charges

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  • Vibration-excitation-vibration-absorption traveling wave guide microfluid delivery device

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Embodiment approach

[0024] The core component of the present invention is the processing and production of the ultrasonic traveling wave driving micro device (100), and the core idea of ​​the present invention is to bond the PZT-4 sheet (1) and PZT-4 on the ultrasonic traveling wave driving micro device (100). The thin slice (2) can generate a unidirectional linear propagation ultrasonic traveling wave, which can be realized by the following technical solutions:

[0025] 1) Cleaning of silicon wafer

[0026] The first step is to clean the second silicon wafer (5). The purpose of the cleaning treatment is to clean and dry the surface of the second silicon wafer (5) so as to be closely integrated with the subsequent process.

[0027] 2) Si 3 N 4 Film production

[0028] This device uses Si 3 N 4 As the required film material. In the ultrasonic traveling wave driven micro device (100), low-pressure chemical vapor deposition (LPCVD) is used to perform low-stress Si on the second silicon wafer (5) in the LP...

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Abstract

The invention relates to a vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device and belongs to the field of micro-precision drive. The vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device comprises an ultrasonic wave signal generator, an ultrasonic traveling wave drive microcomponent, an inductor and a resistor. According to the vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device, high-frequency vibration is generated through the inverse piezoelectric effect of piezoelectric ceramics, an ultrasonic traveling wave sound field is generated in a micro-pipeline through a vibration excitation and vibration adsorption principle, acoustic radiation pressure in the sound field can drive microfluid in the micro-pipeline to be delivered in the traveling wave direction, point drive of traditional microfluid drive is changed into face drive, and the whole sound field is a drive source. The vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device has the beneficial effects that no movable component exits, the control manner is simple, control precision is high, and high miniaturization and high integration are achieved.

Description

Technical field [0001] The invention relates to an excitation-vibration-absorbing traveling wave guiding device for microfluid transportation, belonging to the field of micro-precision driving. Background technique [0002] In recent years, due to the rapid development of new technologies and the continuous promotion of market demand for microfluidic devices, microfluidic systems have become a research focus in the scientific and business circles. The drive and control of microfluidics is a frequently encountered problem in microfluidic systems, and is one of the key technologies that need to be resolved in the development of MEMS. With the advancement of biochip technology, it is urgent to realize automatic and precise driving and control of trace fluids. Therefore, the development of microfluidic drive and control technology seriously affects the further miniaturization and performance improvement of microfluidic devices. At present, the research of microfluidic drive and con...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B43/12
CPCF04B43/0009F04B43/12F04B43/1223
Inventor 江海吕庆庆顾守东路崧刘建芳王吉举王全伟吴亚东王迪
Owner JILIN UNIV
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