A magnetorheological precision machine tool vibration isolator

Abstract

The invention discloses a magneto-rheological vibration isolator for a precision machine tool, comprising a piston rod, a rubber main spring and an upper belleville spring, wherein the piston rod is penetrated in the rubber main spring along the vertical direction; the piston rod is sleeved by the upper belleville spring which is located above the rubber main spring and is connected in parallel with the rubber main spring; and the piston rod is also provided with a regulating structure for regulating the upper belleville spring to be in a negative stiffness state. According to the magneto-rheological vibration isolator, the upper belleville spring connected in parallel with the rubber main spring is arranged on the basis of the existing rubber main spring, the upper belleville spring is enabled to generate predeformation to obtain the required negative stiffness through the regulating structure during use, in this way, the motion stiffness of the vibration isolator can be reduced on the premise that the vibration isolator is kept to have sufficient support stiffness, the static and dynamic stiffness uncoupling of a supporting structure can be realized, and the inherent frequency of a vibration isolation system can be effectively reduced. Due to the adoption of reasonable design, the motion stiffness at an equilibrium position of the vibration isolation system is enabled to be close to zero, thereby realizing ultralow-frequency vibration isolation.

Description

technical field [0001] The invention relates to a magneto-rheological precision machine tool vibration isolator. Background technique [0002] With the rapid development of science and technology, aerospace, optical industry, integrated circuit manufacturing and other industries have entered the era of precision and ultra-precision. The processing machine tools are extremely sensitive to environmental vibrations, and the requirements for vibration isolation are extremely stringent. For example, gyroscopes in the aerospace industry The processing accuracy of the required bearings and optical mirrors in the optical industry has reached the sub-micron level, the dimensional accuracy is higher than 0.1µm, and the processing surface roughness Ra is less than 0.03µm. The processing environment must meet the ultra-quiet requirements, such as integrated circuits. In the manufacturing industry, 64G dynamic random access memory (DRAM) with a line width of 0.07µm has come out, and its ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a magneto-rheological precision machine tool vibration isolator to solve the technical problem of poor low-frequency vibration isolation capability existing in the prior art

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