Manufacturing apparatus and manufacturing method
A technology for a manufacturing apparatus and a manufacturing method, which is applied to the manufacturing apparatus and the manufacturing field, can solve problems such as increase in operating cost, and achieve the effects of suppressing the reduction in productivity, suppressing the increase in operating cost, and suppressing the increase in operation cost.
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Embodiment 1
[0042] refer to figure 1 (a)~ Figure 7 (b) Example 1 of the production apparatus of the present invention will be described. For easy understanding, any of the drawings in this application document is appropriately omitted or exaggerated and schematically shown. The same reference numerals are assigned to the same constituent elements, and explanations thereof are appropriately omitted.
[0043] Such as figure 1 of (a), figure 1 As shown in (b), the QFN substrate 1 has a lead frame 2 . Semiconductor chip mounting portions (die pads: Japanese: dipad) 4 for mounting semiconductor chips (functional elements) 3 are arranged in a grid pattern on the lead frame 2 . The lead frame 2 is formed of metal such as copper (Cu) and 42 alloy (Fe—Ni), and its surface is subjected to lead-free tin plating (not shown). Many pins 5 are arranged around each die pad 4 . exist figure 1 of (a), figure 1 In (b), four pins 5 connected to electrodes (not shown) of the semiconductor chip 3 are...
Embodiment 2
[0078] refer to Figure 8 Example 2 of the production apparatus of the present invention will be described. Such as Figure 8 As shown, the manufacturing device 27 is a device for singulating a cut object (multilayer structure) into a plurality of products. The manufacturing apparatus 27 includes a substrate supply module A, a substrate cutting module B, and an inspection module C as respective components. Each component (modules A to C) is detachable and replaceable with respect to other components.
[0079] The substrate supply module A is provided with a substrate supply mechanism 28 . The QFN substrate 1 corresponding to the object to be cut is delivered from the substrate supply mechanism 28 and transferred to the substrate cutting module B by a transfer mechanism (not shown). In the board|substrate supply module A, the control part CTL for setting and controlling the operation|movement of the manufacturing apparatus 27, cutting conditions, etc. is provided.
[0080]...
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Abstract
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