High-gradient visual tubular single crystal growth furnace

A growth furnace and tube-type technology, which is applied in the field of large-gradient visualized tube-type single crystal growth furnace, can solve the problems that the growth interface cannot be observed, and it is difficult to realize a large gradient, so as to facilitate the promotion of industrialization and avoid the radial temperature field Effects of asymmetric, low-cost advantages

Active Publication Date: 2016-09-21
INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This tubular single crystal growth furnace solves the problems that traditional tubular growth furnaces

Method used

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  • High-gradient visual tubular single crystal growth furnace
  • High-gradient visual tubular single crystal growth furnace
  • High-gradient visual tubular single crystal growth furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] a kind of like figure 1 and figure 2 The large-gradient visualized tubular single crystal growth furnace shown includes an upper furnace, a lower furnace, and a middle observation area; the upper furnace includes an upper furnace shell 21, an upper insulation cotton 11, and an upper heating resistance wire 31 from outside to inside. , the lower furnace from outside to inside is the lower furnace shell 22, the lower insulation cotton 12 and the lower heating resistance wire 32; Head 5; in the middle observation area between the upper furnace and the lower furnace, a gold-plated quartz inner tube 6 and a non-gold-plated quartz outer tube 7 are sequentially arranged from the inside to the outside, and the gold-plated quartz inner tube 6 and the non-gold-plated quartz outer tube 7 There is a gap between them; the upper furnace shell 21, the upper thermal insulation cotton 11, the upper heating resistance wire 31, the lower furnace shell 22, the lower thermal insulation co...

Embodiment 2

[0044] a kind of like figure 1 and figure 2 The large-gradient visualized tubular single crystal growth furnace shown includes an upper furnace, a lower furnace, and a middle observation area; the upper furnace includes an upper furnace shell 21, an upper insulation cotton 11, and an upper heating resistance wire 31 from outside to inside. , the lower furnace from outside to inside is the lower furnace shell 22, the lower insulation cotton 12 and the lower heating resistance wire 32; Head 5; in the middle observation area between the upper furnace and the lower furnace, a gold-plated quartz inner tube 6 and a non-gold-plated quartz outer tube 7 are sequentially arranged from the inside to the outside, and the gold-plated quartz inner tube 6 and the non-gold-plated quartz outer tube 7 There is a gap between them; the upper furnace shell 21, the upper thermal insulation cotton 11, the upper heating resistance wire 31, the lower furnace shell 22, the lower thermal insulation co...

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Abstract

The invention discloses a high-gradient visual tubular single crystal growth furnace. The furnace comprises an upper furnace body, a lower furnace body and a middle observation area. The upper furnace body is sequentially provided with an upper furnace shell, upper heat-preserving cotton and an upper heating resistance wire from outside to inside, the lower furnace body is sequentially provided with a lower furnace shell, lower heat-preserving cotton and a lower heating resistance wire from outside to inside, an upper furnace opening plug is arranged on the top of the upper furnace body, and a lower furnace opening plug is arranged at the bottom of the lower furnace body; the middle observation area between the upper furnace body and the lower furnace body is sequentially provided with gold-plated quartz inner tubes and non-gold-plated quartz outer tubes from inside to outside, and gaps are formed between the gold-plated quartz inner tubes and non-gold-plated quartz outer tubes; the circle centers of the upper furnace shell, the lower upper furnace shell, the upper heat-preserving cotton, the lower heat-preserving cotton, the upper heating resistance wire, the lower heating resistance wire, the gold-plated quartz inner tubes and non-gold-plated quartz outer tubes are coaxial. The high-gradient visual tubular single crystal growth furnace avoids the phenomenon that a radial temperature field is not symmetrical due to single-window observation, observation is easy, manufacturing cost is low, and industrial popularization is easy.

Description

technical field [0001] The invention relates to the technical field of crystal crystallization equipment, in particular to a large-gradient visualized tubular single crystal growth furnace. Background technique [0002] The Bridgeman-Stockbarge method (Bridgeman-Stockbarge method) has the advantages of simple process, strong versatility, no need for seed crystal guidance, and crystal growth in a closed ampoule, which is not easily polluted by the environment. The first choice for exploring the initial stage of growing new crystals by the melt method. In the long-term research practice, people have realized the growth of different types of crystals by improving the method to varying degrees, and obtained a variety of new crystals that can meet the needs of national production. Such as gallium arsenide, sulfur gallium silver, gallium selenium silver, phosphorus germanium zinc and so on. [0003] Tube furnaces used for Bridgman method single crystal growth usually use segment...

Claims

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Application Information

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IPC IPC(8): C30B11/00
CPCC30B11/00
Inventor 袁泽锐康彬唐明静张羽窦云巍陈莹方攀
Owner INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS
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