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High-gradient visual tubular single crystal growth furnace

A growth furnace and tube-type technology, which is applied in the field of large-gradient visualized tube-type single crystal growth furnace, can solve the problems that the growth interface cannot be observed, and it is difficult to realize a large gradient, so as to facilitate the promotion of industrialization and avoid the radial temperature field Effects of asymmetric, low-cost advantages

Active Publication Date: 2016-09-21
INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This tubular single crystal growth furnace solves the problems that traditional tubular growth furnaces are difficult to achieve large gradients and cannot observe the growth interface. Gradient area visible

Method used

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  • High-gradient visual tubular single crystal growth furnace
  • High-gradient visual tubular single crystal growth furnace
  • High-gradient visual tubular single crystal growth furnace

Examples

Experimental program
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Effect test

Embodiment 1

[0041] a kind of like figure 1 and figure 2 The large-gradient visualized tubular single crystal growth furnace shown includes an upper furnace, a lower furnace, and a middle observation area; the upper furnace includes an upper furnace shell 21, an upper insulation cotton 11, and an upper heating resistance wire 31 from outside to inside. , the lower furnace from outside to inside is the lower furnace shell 22, the lower insulation cotton 12 and the lower heating resistance wire 32; Head 5; in the middle observation area between the upper furnace and the lower furnace, a gold-plated quartz inner tube 6 and a non-gold-plated quartz outer tube 7 are sequentially arranged from the inside to the outside, and the gold-plated quartz inner tube 6 and the non-gold-plated quartz outer tube 7 There is a gap between them; the upper furnace shell 21, the upper thermal insulation cotton 11, the upper heating resistance wire 31, the lower furnace shell 22, the lower thermal insulation co...

Embodiment 2

[0044] a kind of like figure 1 and figure 2 The large-gradient visualized tubular single crystal growth furnace shown includes an upper furnace, a lower furnace, and a middle observation area; the upper furnace includes an upper furnace shell 21, an upper insulation cotton 11, and an upper heating resistance wire 31 from outside to inside. , the lower furnace from outside to inside is the lower furnace shell 22, the lower insulation cotton 12 and the lower heating resistance wire 32; Head 5; in the middle observation area between the upper furnace and the lower furnace, a gold-plated quartz inner tube 6 and a non-gold-plated quartz outer tube 7 are sequentially arranged from the inside to the outside, and the gold-plated quartz inner tube 6 and the non-gold-plated quartz outer tube 7 There is a gap between them; the upper furnace shell 21, the upper thermal insulation cotton 11, the upper heating resistance wire 31, the lower furnace shell 22, the lower thermal insulation co...

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Abstract

The invention discloses a high-gradient visual tubular single crystal growth furnace. The furnace comprises an upper furnace body, a lower furnace body and a middle observation area. The upper furnace body is sequentially provided with an upper furnace shell, upper heat-preserving cotton and an upper heating resistance wire from outside to inside, the lower furnace body is sequentially provided with a lower furnace shell, lower heat-preserving cotton and a lower heating resistance wire from outside to inside, an upper furnace opening plug is arranged on the top of the upper furnace body, and a lower furnace opening plug is arranged at the bottom of the lower furnace body; the middle observation area between the upper furnace body and the lower furnace body is sequentially provided with gold-plated quartz inner tubes and non-gold-plated quartz outer tubes from inside to outside, and gaps are formed between the gold-plated quartz inner tubes and non-gold-plated quartz outer tubes; the circle centers of the upper furnace shell, the lower upper furnace shell, the upper heat-preserving cotton, the lower heat-preserving cotton, the upper heating resistance wire, the lower heating resistance wire, the gold-plated quartz inner tubes and non-gold-plated quartz outer tubes are coaxial. The high-gradient visual tubular single crystal growth furnace avoids the phenomenon that a radial temperature field is not symmetrical due to single-window observation, observation is easy, manufacturing cost is low, and industrial popularization is easy.

Description

technical field [0001] The invention relates to the technical field of crystal crystallization equipment, in particular to a large-gradient visualized tubular single crystal growth furnace. Background technique [0002] The Bridgeman-Stockbarge method (Bridgeman-Stockbarge method) has the advantages of simple process, strong versatility, no need for seed crystal guidance, and crystal growth in a closed ampoule, which is not easily polluted by the environment. The first choice for exploring the initial stage of growing new crystals by the melt method. In the long-term research practice, people have realized the growth of different types of crystals by improving the method to varying degrees, and obtained a variety of new crystals that can meet the needs of national production. Such as gallium arsenide, sulfur gallium silver, gallium selenium silver, phosphorus germanium zinc and so on. [0003] Tube furnaces used for Bridgman method single crystal growth usually use segment...

Claims

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Application Information

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IPC IPC(8): C30B11/00
CPCC30B11/00
Inventor 袁泽锐康彬唐明静张羽窦云巍陈莹方攀
Owner INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS
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