MEMS gas sensor and manufacturing method thereof

A gas sensor and production method technology, which are applied in gaseous chemical plating, manufacturing of microstructure devices, decorative arts, etc., can solve the problems of high precision, integrated low power consumption and other problems of gas sensors, and achieve light weight, high precision, The effect of high package integration

Active Publication Date: 2016-10-05
郑州炜盛电子科技有限公司
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Problems solved by technology

[0004] The purpose of the present invention is to provide a MEMS gas sensor and its manufacturing method, aiming to solve the problems of mass production, high precision, integration and low power consumption of gas sensors in the prior art.

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  • MEMS gas sensor and manufacturing method thereof
  • MEMS gas sensor and manufacturing method thereof

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Embodiment Construction

[0038] In order to make the objectives, technical solutions and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

[0039] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may be a central element at the same time. When an element is said to be "connected to" another element, it can be directly connected to the other element or an intermediate element may also be present.

[0040] It should also be noted that the orientation terms such as left, right, up, and down in this embodiment are only relative concepts or refer to the normal use state of the product, and should not be considered as restrictive....

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Abstract

The invention relates to the technical field of gas detection, and provides an MEMS gas sensor and a manufacturing method thereof. The MEMS gas sensor comprises: a monocrystalline silicon substrate; an upper silicon nitride layer and an upper silicon oxide layer which are superposed on the upper surface of the monocrystalline silicon substrate from bottom to top; a lower silicon nitride layer placed on the lower surface of the monocrystalline silicon substrate; a heating electrode placed on the silicon oxide layer; an insulating layer placed on the heating electrode; a measurement electrode placed on the insulating layer; a gas-sensitive layer placed on the measurement electrode and electrically connected with the measurement electrode; and a heat insulation chamber positioned under the upper silicon nitride layer and formed by etching the lower silicon nitride layer and the monocrystalline silicon substrate. The gas sensor has the advantages of high precision, light weight, small dimension, low power dissipation, high usefulness, low cost, and realization of large-batch production.

Description

Technical field [0001] The invention relates to the field of gas detection technology, and more specifically, to a MEMS gas sensor and a manufacturing method thereof. Background technique [0002] MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) gas sensor is a gas sensor based on microelectronic technology and micro-processing technology. The principle of the gas sensor is to use an impedance device made of a metal oxide film. At a certain temperature, gas molecules react with the metal oxide on the surface to cause a change in resistivity, thereby realizing gas detection. [0003] Although with the development of MEMS technology, the production process of gas sensors is gradually optimized, but there is still room for improvement in mass production, high precision, integration, and low power consumption of gas sensors. Summary of the invention [0004] The purpose of the present invention is to provide a MEMS gas sensor and a manufacturing method thereof, a...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/04B81C1/00
Inventor 张绍达高胜国钟克创古瑞琴
Owner 郑州炜盛电子科技有限公司
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