The invention belongs to the related technical field of microelectronic packaging, and discloses an airtight packaging structure of an integrated thermoelectric refrigerator and a preparation method thereof. The airtight packaging structure of the integrated thermoelectric refrigerator comprises a packaging cover plate, a
chip, the thermoelectric refrigerator and a three-dimensional
ceramic substrate, a cavity is formed in the three-dimensional
ceramic substrate, the
chip is arranged in the cavity, and the packaging cover plate is in airtight connection with the three-dimensional
ceramic substrate so as to
package the
chip in the cavity; the three-dimensional
ceramic substrate is connected with the thermoelectric refrigerator, and the three-dimensional
ceramic substrate and the thermoelectric refrigerator share one
ceramic substrate, so that the heat dissipation refrigerator and the three-dimensional ceramic substrate are combined to form an airtight packaging structure. According to the airtight packaging structure, the three-dimensional DPC ceramic substrate is used, and
interconnection between the inside and the outside of the cavity is realized by utilizing the cavity structureand the vertical
interconnection characteristic of the three-dimensional DPC ceramic substrate; the three-dimensional DPC ceramic substrate is used as a ceramic substrate of the TEC, that is, the thermoelectric refrigerator and the three-dimensional ceramic substrate share the ceramic substrate, so that one layer of ceramic substrate and one layer of
welding interface are reduced, the heat dissipation capability of the device is improved, the
thermal resistance can be reduced, and the packaging integration degree is improved.