Follow-up auxiliary anode electrolytic wire cut machining system and method

Abstract

The invention relates to a follow-up auxiliary anode electrolytic wire cut machining system and a method and belongs to the technical field of electrolytic machining. The follow-up auxiliary anode electrolytic wire cut machining system comprises a workpiece anode (6), auxiliary anodes (5), an electronic load (8), tool wire electrodes (3) and a machining power supply (7), wherein the auxiliary anodes (5) are fixed relative to and follow the tool wire electrodes (3); the positive pole of the machining power supply (7) is connected with one end of each auxiliary anode (5) and one end of the electronic load (8), and the negative pole of the machining power supply (7) is connected with the tool wire electrodes (3); and the other end of the electronic load (8) is connected with the workpiece anode (6). During machining, the potentials of the auxiliary anodes are higher than that of a workpiece. In the non-machining areas of the upper surface and the lower surface of the workpiece, most of potentials of the tool wire electrodes are attracted by the auxiliary anodes, so that stray corrosion in the non-machining areas of the upper surface and the lower surface of the anode of the workpiece are inhibited.

Description

Technical field [0001] The invention relates to a servo-type auxiliary anode electrolytic wire cutting processing system and method, belonging to the technical field of electrolytic processing. Background technique [0002] With the application of micro-electromechanical systems (MEMS) devices in aerospace, medical and health, bioengineering, environmental detection, computer technology, microelectronics technology and micro sensors and other fields, it is becoming more and more widely used. As the support of MEMS device processing technology, microfabrication technology has increasingly become one of the research hotspots of scholars at home and abroad. [0003] For example, the micro-slit array structure of large area, high aspect ratio, high Z element heavy metal grating and stamping carbide progressive die of integrated circuit lead frame in X-ray grating differential phase imaging grating is a common structure in MEMS products. The structure generally consists of micro...

AI Technical Summary

Problems solved by technology

However, stray corrosion may still occur on the upper surface of the workpiece, which will affect the machining accuracy of electrolytic wire cutting

[0006] At present, the stray corrosion problem in the processing process has become one of the factors affecting the machining accuracy of EWDM. In order to improve the machining accuracy of EWDM, it is necessary to propose a processing method to reduce stray corrosion.

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