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A dual-optical-path three-dimensional speckle interference system based on spectroscopes

A speckle interference and spectroscopic technology, applied in the direction of optical devices, measuring devices, instruments, etc., can solve problems such as complex structures, and achieve the effects of improved resolution, simple structure, and convenient measurement

Inactive Publication Date: 2016-10-26
TIANJIN UNIV
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Problems solved by technology

Zhang Xi of the 711th Research Institute of China Shipbuilding Industry Corporation developed a three-dimensional speckle interferometer with three optical paths. Three-dimensional speckle interference system, but the structure is complex

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  • A dual-optical-path three-dimensional speckle interference system based on spectroscopes

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Embodiment Construction

[0019] Those skilled in the art understand that both electronic speckle interferometry (ESPI) and digital speckle correlation method (DSCM) (here ESPI and DSCM are collectively referred to as speckle interferometry) are both non-contact full-field testing techniques, and digital speckle correlation method (DSCM) has unique advantages in in-plane displacement measurement. Compared with other interferometry methods, it has the advantages of simple optical path, low requirement for measurement environment, artificial speckle or some natural texture, etc. It is especially beneficial for the measurement of large deformation or micro deformation, and the application of DSCM to measure the in-plane displacement has one less optical path arrangement than that of ESPI to measure the in-plane displacement. However, it is difficult to measure the out-of-plane displacement by DISC, and electronic speckle interferometry (ESPI) can realize the measurement of out-of-plane displacement. Altho...

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Abstract

The invention discloses a dual-optical-path three-dimensional speckle interference system based on spectroscopes. The system comprises a laser, a first spectroscope, a second spectroscope, a third spectroscope, a fourth spectroscope, a fifth spectroscope, a first totally-reflecting mirror, a second totally-reflecting mirror, a third totally-reflecting mirror, a fourth totally-reflecting mirror, a first beam expanding mirror, a second beam expanding mirror, an amplification system and a CCD camera. The advantages are that transient three-dimensional displacement in the laser processing process can be given, and time and space resolution capability can be improved with further development of a high-speed photography system and a long-distance microscope; and electronic speckle interferometry and digital speckle correlation are combined organically and respective advantages thereof are utilized, thereby facilitating measurement and providing effective and practical experimental means for micro-scale transient three-dimensional thermal deformation needed in the study of laser processing.

Description

technical field [0001] The present invention relates to an optical test technology, more specifically, the present invention relates to a dual optical path high-speed micro-speckle interference system for measuring micro-scale transient three-dimensional displacement field. Background technique [0002] At present, optical testing technology has become an important means of scientific research and penetrates into various research fields. It has always been a test field and Important topics and goals of experimental solid mechanics. [0003] Due to the rapid development of laser processing technology, the need for non-contact micro-scale transient 3D thermal deformation measurement technology is increasing. Laser processing technology has many advantages such as precise control of microscopic processes, high production efficiency, and low processing cost, and is therefore widely used in the fields of microelectronics, photonic crystal devices, micromachining, and the product...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B9/02
CPCG01B11/022G01B9/02095
Inventor 唐晨陈明明苏永钢李碧原
Owner TIANJIN UNIV
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