Silicon tetrachloride energy-saving vaporizer

Abstract

The invention discloses a silicon tetrachloride energy-saving vaporizer. The silicon tetrachloride energy-saving vaporizer comprises a vaporizer casing, a hydrogen distributor and a closed type heating pipe; a silicon tetrachloride inlet and a silicon tetrachloride vapor outlet are respectively formed in the bottom ends and top ends of two opposite wall surfaces of the vaporizer casing; the hydrogen distributor is arranged at the bottom of the vaporizer casing and connected with an insertion pipe communicated with the exterior of the vaporizer casing, and the closed type heating pipe is longitudinally arranged in the vaporizer casing; the orifice of the closed type heating pipe is closed, an electric heating bar is inserted into the heating pipe, and heat-conducting oil is filled between the electric heating bar and the housing of the heating pipe. Through the structure design of the closed type heating pipe, not only can the heating operation be simplified, but also heating of a great quantity of heat-conducting oil can be avoided, energy consumption can be effectively reduced, the heating contact area is large, the temperature is even to provide a high-efficiency and stable heat source for silicon tetrachloride, the comprehensive performances are excellent, and the market prospects are wide.

Description

technical field [0001] The invention relates to the field of polysilicon production equipment, in particular to a silicon tetrachloride energy-saving vaporizer. Background technique [0002] In recent years, with the rapid development of the solar photovoltaic industry, polysilicon as a raw material constant for solar panels or components has also increased significantly. The huge pressure has also brought troubles to the cyclic generation of trichlorosilane, the raw material for polysilicon production, and to realize the conversion of silicon tetrachloride to trichlorosilane, the first is to realize the vaporization of silicon tetrachloride. Therefore, in order to achieve the above purpose, silicon tetrachloride must be vaporized first. [0003] The existing silicon tetrachloride vaporization devices are basically horizontal or vertical, and use electric heating rods or U-shaped heat exchange tubes to provide heat sources to achieve the purpose of vaporization. However, t...

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Problems solved by technology

However, the electric heating rod has the disadvantages of small contact area, uneven temperature, and turbulent flow of silicon tetrachloride. However, if the U-shaped heat exchange tube is used and the heat transfer oil is used as the heat transfer medium, an additional heat transfer oil storage tank needs to be set up, respectively. The connection between the inlet and outlet of the type heat exchange tube is complicated, and the heating capacity of the heat transfer oil is large, and the energy cost is high

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