A transport device and transport method for an ion beam polishing system
A technology of transportation device and ion beam, which is applied in the direction of grinding/polishing equipment, grinding feed movement, optical surface grinder, etc., can solve the problems of contradictory design principles, complex structure, low reliability, etc., and achieve high precision of traction in place , Low operation difficulty and high linear motion precision
Active Publication Date: 2018-10-09
四川至臻精密光学有限公司
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Problems solved by technology
This is contrary to the design principle of the existing transportation device
Moreover, the long-term use reliability of the existing transportation device is low, easy to damage, complex structure and unfavorable for maintenance, which brings great troubles to users
Method used
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[0033] Such as figure 1 As shown, a dual vacuum ion beam polishing system includes a vacuum working chamber 100 and a vacuum auxiliary chamber 101, the vacuum working chamber 100 communicates with the vacuum auxiliary chamber 101, and a A gate valve 102 capable of controlling the on-off of the two. The vacuum studio 100 is provided with an ion source, an ion source movement system and a neutralizer.
[0034] Such as figure 2 and image 3 As shown, the transportation device of an ion beam polishing system according to the present invention is set in the vacuum working chamber 100 and the vacuum auxiliary chamber 101, and is used for transportation and polishing of workpieces in the dual vacuum ion beam polishing system.
[0035]The transportation device includes a guide rail assembly, a transportation vehicle 1 for installing workpieces, a linear motion module 2 and a control unit (not shown in the figure). The rail assembly includes a first linear guide 3 arranged in the ...
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The invention relates to a transportation device for an ion beam polishing system. The transportation device comprises a guide rail assembly, a transporter used for installing a workpiece, a linear movement module, a control unit and a connecting mechanism. The guide rail assembly comprises a first linear guide rail and a second linear guide rail. The transporter is arranged on the guide rail assembly. When a sliding block slides to a position near the transporter, the control unit can control the connecting mechanism to make the sliding block and the transporter be connected and locked; and when the sliding block and the transporter are connected and locked, the control unit can control the sliding block to slide and drive the transporter to move on the first linear guide rail and the second linear guide rail. The transporter and the second linear guide rail are arranged in a vacuum auxiliary room in a matched mode, the occupied space is small, the transporter and the second linear guide rail are simple in structure, operating difficulty is low, and installation and matching are easy; and the linear movement module is used as a pulling device for the transporter and does not occupy the space of the vacuum auxiliary room, the linear movement precision is high, and thus the transporter in-place pulling precision is high.
Description
technical field [0001] The invention belongs to the field of ion beam processing equipment, and in particular relates to a transport device and a transport method for an ion beam polishing system. Background technique [0002] At present, ion beam polishing is a new technology for deterministic processing of high-precision optical components. It is based on the physical sputtering effect when low-energy ions directly bombard optical mirrors to remove surface materials of optical components. The incident ions transfer energy to the surface atoms of the optical element through cascade collisions. When the energy obtained by the surface atoms of the optical element is sufficient to overcome the surface binding energy, they will be detached from the surface of the workpiece in the form of atoms. Therefore, ion beam polishing has nanometer-scale processing precision. When the low-energy ion beam sweeps the surface of the optical element with a variable speed or dwell time combin...
Claims
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IPC IPC(8): B24B13/00B24B41/00
CPCB24B13/00B24B41/005
Inventor 施春燕
Owner 四川至臻精密光学有限公司