Optical micro-nano resonant cavity structure and fabrication method for same

Abstract

The invention provides an optical micro-nano resonant cavity structure and a fabrication method for the same. The optical micro-nano resonant cavity structure comprises two single-row particle chains which can implement total reflection of working electromagnetic waves, wherein each single-row particle chain is composed of multiple particles which are arranged at intervals; and because of an interval distance between the two single-row particle chains, a resonance wavelength of the optical micro-nano resonant cavity structure is equal to a wavelength of the working electromagnetic waves. According to the invention, the feature of total reflection of the single-row particle chains towards specific polarized light is applied and a novel optical micro-nano resonant cavity with high-quality factors is obtained through optimization of the structure of the single-row particle chains as well as the distance between the two single-row particle chains. The resonant cavity designed based on the total reflection of the two single-row particle chains is characterized by low loss, the high-quality factors and the small size, and promises very good application prospect in the field of integrated optics.

Description

technical field [0001] The invention relates to a structure of an optical micro-nano resonant cavity and a manufacturing method thereof, in particular to an optical resonant cavity with a high quality factor based on a micro-nano structure of two single-row particle chains and a manufacturing method thereof. Background technique [0002] Optical resonators have huge applications in the field of optics, among which Fabry-Perot resonators are the most widely used ones in optical resonators. The quality factor reflection is one of the most critical indicators of the performance level of the Fabry-Perot resonator, and the quality factor of the resonator mainly depends on the performance of the mirror. The mirrors used in most Fabry-Perot resonators are traditional metal thin-film mirrors, which can reflect electromagnetic waves in a certain bandwidth; however, for blue light or For higher frequency light, due to the significantly larger skin depth of the metal material, the abs...

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Problems solved by technology

The mirrors used in most Fabry-Perot resonators are traditional metal thin-film mirrors, which can reflect electromagnetic waves in a certain bandwidth; however, for blue light or For higher frequency light, due to the significantly larger skin depth of the metal material, the absorption loss of the metal itself greatly increases, which greatly reduces the performance of traditional reflectors based on metal thin films, which greatly limits the quality of the resonant cavity. factor

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