High-sensitivity flexible wearable strain sensor and low-cost manufacture method thereof

Abstract

The invention belongs to the field of sensors, and particularly relates to a high-sensitivity flexible wearable strain sensor and a low-cost manufacture method thereof. The sensor comprises a flexible substrate, a sensitive layer positioned on the flexible substrate, and electrodes positioned at the two ends of the sensitive layer, wherein the sensitive layer adopts a graphite nano-particle film and is prepared through a heat evaporation deposition mode. The sensitive layer is in ohmic contact with the electrodes. The sensitive layer adopts a nanoscale continuous graphite particle film, when the sensor is subjected to external strain, contact between nano-particles is subjected to quick response, and the conductive path and the contact area are changed, so that resistance is obviously changed, input strain is converted into electrical signals to be output, high-sensitivity strain detection can be realized, the response time is short, the responsivity is high, and strain within a certain range can be detected. The preparation method of the sensor is simple, and the cost is low.

Description

technical field [0001] The invention relates to the technical field of strain sensing, in particular to a highly sensitive flexible wearable strain sensor and a low-cost manufacturing method thereof. Background technique [0002] A sensor is a device or device that senses a specified measured value and converts the measured value into a useful signal according to a certain rule. Under the influence of external factors, all materials will make corresponding and characteristic reactions. Among them, the materials that are most sensitive to external effects, that is, materials with functional properties, are used to make sensitive elements of sensors. Sensors can be divided into position sensors, liquid level sensors, energy consumption sensors, speed sensors, thermal sensors, acceleration sensors and radiation sensors according to their uses. Sensors can be divided into piezoelectric sensors, piezoresistive sensors, capacitive sensors, photoelectric sensors, etc. according t...

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Problems solved by technology

[0005] However, on the one hand, the sensitivity of the flexible strain sensor in the prior art is not high, and the sensitivity factor (GF) is less than 1000; Tubes and other materials, while materials such as graphene and carbon nanotubes are complex to prepare and costly

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