Device for manufacturing integrated thin film solar cell

Abstract

A device for manufacturing an integrated thin film solar cell, according to one embodiment of the present invention, is a device for manufacturing an integrated thin film solar cell in which a plurality of unit cells are electrically connected in series in a vacuum state, and the manufacturing device comprises: a photoelectric conversion unit-forming process chamber which forms a photoelectric conversion unit by emitting a photoelectric conversion material onto a substrate having a first conductive layer, which is formed from one base line inside each of a plurality of trenches formed on the substrate to areas such as a bottom surface of each of the trenches, one side surface connected to the bottom surface, and a protruding surface of the substrate connected to the one side surface; and a second conductive layer-forming process chamber which forms a second conductive layer from another base line inside each of the trenches to areas such as the bottom surface of each of the trenches, the other side surface connected to the bottom surface, and a protruding surface of the substrate connected to the other side surface, wherein the photoelectric conversion unit-forming process chamber and the second conductive layer-forming process chamber are capable of performing each of the processes in a vacuum state.

Description

technical field [0001] The present invention relates to a device for the manufacture of integrated thin film solar cells. Background technique [0002] Generally, a solar cell is formed by using a junction consisting of a p-type semiconductor and an n-type semiconductor (i.e., a semiconductor p-n junction), a junction consisting of a metal and a semiconductor (i.e., a metal / semiconductor (MS) junction (so-called Schottky junction)) , or a device that converts sunlight energy into electricity by the photovoltaic effect caused by a metal / insulator / semiconductor (MIS) junction. [0003] Solar cells are mainly classified into silicon-based solar cells, compound-based solar cells, and organic-based solar cells according to materials used for the solar cells. According to the semiconductor phase, silicon solar cells are divided into single crystal silicon (sc-Si) solar cells, polycrystalline silicon (pc-Si) solar cells, microcrystalline silicon (μc-Si:H) solar cells and amorphous...

AI Technical Summary

Problems solved by technology

Therefore, the manufacturing cost of integrated thin-film solar cells rises

[0012] In addition, in the manufacture of integrated transparent thin film solar cells using laser patterning technology, integrated transparent thin film solar cells become more expensive

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