Method for manufacturing a polycrystalline silicon ingot
A polycrystalline silicon ingot and a technology for a manufacturing method are applied in the field of silicon ingot manufacturing, and can solve problems such as the inability to effectively reduce the oxygen impurity concentration of the polycrystalline silicon ingot.
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[0028] see figure 1 , an embodiment of the polysilicon manufacturing method of the present invention includes the following steps: a silicon material melting step S1, a solid silicon crystal isolation layer forming step S2, a polycrystalline silicon ingot growing step S3, a demolding step S4, and a solid silicon crystal The isolation layer is removed in step S5.
[0029] First, perform the silicon material melting step S1 (see also figure 2 ), a release layer 33 containing a silicon material 2 and having a bottom wall 31, a surrounding wall 32 surrounding the bottom wall 31 and an inner surface formed on both the bottom wall 31 and the surrounding wall 32 The crucible 3 is set in a thermal field 50, so that the silicon material 2 in the crucible 3 is heated by the thermal field 50 to be melted into a silicon molten soup 21 (such as image 3 shown).
[0030] Preferably, the release layer 33 is made of silicon nitride material. The crystal growth furnace system 5 includes a...
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