Flexible piezoresistive tactile sensor array and preparation method thereof

Abstract

The invention provides a flexible piezoresistive touch sensor array and a preparation method thereof. The sensor array comprises N*N separated piezoresistive layers and a coplanar electrode layer. The piezoresistive layers are arranged on the coplanar electrode layer. Each piezoresistive layer comprises an upper finger pressing layer, a middle sensitive layer and a bottom sensitive layer, wherein the three layers are each provided with a micro pyramid; the coplanar electrode layer comprises a polymer electrode substrate and N*N gold electrode pairs located on the polymer electrode substrate. The piezoresistive layers adopt polymer films with the micro pyramid, and due to the three-layer structure, the sensitivity of the sensor at the low-voltage region can be greatly improved. In addition, in order to overcome the defect that a traditional touch sensor is large in crosstalk due to a sandwiched structure, the coplanar electrode layer is adopted, all electrodes are located on the same plane, each piezoresistive layer is attached to the corresponding electrode pair, the piezoresistive units are completely separated, and the sensitivity and anti-interference capacity of the sensor are effectively improved.

Description

technical field [0001] The invention relates to the field of micro-nano electronic devices, in particular to a flexible piezoresistive tactile sensor array and a preparation method thereof. Background technique [0002] Physical measurement and detection techniques utilizing an interface with the skin have been around for more than eight decades. The sense of touch is an important sense when the human body is in contact with the external environment. The sense of touch can refer to the combination of contact, pressure, sliding, temperature, humidity, etc., or it can refer to the feeling of force on the contact surface. Nowadays, because tactile sensors can detect small changes in the surrounding environment and reflect the magnitude of the contact force of objects, tactile sensors have a series of potential applications, such as artificial limbs, machine skin, touch screens, wearable electronic devices, etc. Huge application prospects. Flexible tactile sensors with both fl...

AI Technical Summary

Problems solved by technology

[0010] First, the array includes two layers of electrodes, the upper and lower layers, and no corresponding improvement is made to the pressure-sensitive layer, so that when a certain sensitive unit in the sensor array is subjected to external force, it is easy to affect other sensitive units to cause a change in capacitance. Produce more serious crosstalk effect, thus affecting the accuracy of measurement

[0011] Secondly, this patent only uses a simple planar structure so that when the sensor is subjected to an external force, the capacitance can only change slightly and cannot effectively improve the sensitivity of the sensor

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