Array zeroing high-precision laser large working distance self-collimation device and method

Abstract

The present invention belongs to the precise measurement technology field and the optical engineering field, in particular relates to an array zero setting high-precision laser large-working distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system, and the method is characterized in that by adjusting the reflector, a reflected light beam returns to the center of an image plane of the feedback imaging system, and then by utilizing an angle deflection measurement device on the reflector, the angle change on the surface of a measured object is obtained. According to the present invention, by adding the reflector on a conventional auto-collimation angle measurement system, the problem that the reflected light of the measured object deviates the measurement system, so that the reflected light of the measured object can not be measured, can be avoided, and further the technical advantage that an auto-collimation working range is increased under a same working distance, or the working distance is increased under the same auto-collimation working range, is realized. In addition, by the concrete design of the devices, such as the collimating mirror, the feedback imaging system, the reflector, etc., the device of the present invention is simple in structure and low in manufacturing cost. Meanwhile, according to the present invention, the technical advantages of being able to monitor and measure environmental stability, and being rapid to measure are realized.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to h...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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