Auxiliary cathode tube of double-glow penetrating metal source electrode

Abstract

The invention discloses an auxiliary cathode tube of a double-glow penetrating metal source electrode, and belongs to the technical field of ion penetrating metal auxiliary cathodes. The auxiliary cathode tube of the double-glow penetrating metal source electrode comprises a tube body and a pedestal; the tube body is arranged at the upper end of the pedestal; small tapered holes which are arranged in the form of circular array are formed in the tube body; relatively big ends of the small tapered holes are positioned at the outer side of the tube body; the pedestal is a hollow structure; a chassis is spaced between the pedestal and the tube body; a groove is formed in the position, at one side of the tube body, of the chassis; and a plurality of through holes are further formed around the groove. The invention provides the auxiliary cathode tube which can prevent device scrap caused by source electrode fusing, guarantees penetrating metal uniformity and realizes multi-element double-glow penetrating metal with multiple physical forms.

Description

technical field [0001] The invention relates to the technical field of ion-infiltrated metal auxiliary cathodes, in particular to an auxiliary cathode cylinder for double infiltrated metal sources. Background technique [0002] Double-layer glow ion metal infiltration technology is a new surface modification technology for alloying the surface of metal materials. This technology extends the ion nitriding technology that can only infiltrate non-metal elements to the plasma surface alloying technology that can infiltrate all solid metal elements and non-metal elements. Among them, the electrode structure is the core of the technology. Through the study of the basic electrode structure of the double-layer glow ionization metallization technology, it is concluded that the electrode structure can be divided into four types: flat plate type, hollow cathode type, unequal potential hollow cathode type and composite type. The geometric structure of the ion-infiltrated metal electro...

AI Technical Summary

Problems solved by technology

[0004] The Chinese Patent Publication No. is CN85106757A "Intense Light Ion Metal Penetration Device and Its Method", which discloses a strong light ion metal permeation device and its method designed by utilizing the secondary ignition phenomenon. The barrel-shaped target is made, the workpiece is placed inside, and the infiltrated metal fragments are placed around the workpiece. When the device starts to work, the ionization in the barrel-shaped target produces an "avalanche", forming a high-energy strong light ion area, and completing the process of strong light ion metal penetration. This device The infiltration of metal is not limited and does not require an external heating source to heat the workpiece, but this device will cause uneven internal temperature due to the accumulation of infiltrated metal fragments inside the cylindrical cathode, which will easily cause deformation of the workpiece and the cylindrical cathode, and because the cylinder is up and down Different temperatures will also cause uneven distribution of infiltrated elements on the surface of the workpiece, affecting performance

During glow discharge, the internal temperature is extremely high. It has been proved by experiments that during the infiltration process, the temperature is often uncontrolled and the source electrode melts. If the temperature of this device exceeds the melting point of the metal during the infiltration process, not only will the device If it is integrated with metal fragments, the workpiece will fail, and it will also make it difficult to clean up the device after the event, or even be scrapped directly, increasing resource consumption and labor costs

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