Portable array zeroing high precision large working distance autocollimation device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a portable array zeroing high precision large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. According to the method, a reflected light beam is returned to an image plane center of the feedback imaging system via adjustment of the reflecting mirror, and angular variation of a surface of an object being measured is obtained via use of an angle deflection measuring device on the reflecting mirror; due to arrangement of the reflecting mirror on a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when reflected light deviates from the measurement system can be prevented, and an auto-collimation working range can be increased when working distance remains the same or a working distance advantage can be enhanced when the working range remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the portable array zeroing high precision large working distance auto-collimation device is technically advantageous in that the device is small in size, high in portability and great in measurement precision, and particularly the device is high in measurement precision and high in measurement speed when sampling frequency is low.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a portable array zeroing high-precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of ...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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