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Portable combined zero-setting laser large-working-distance auto-collimation device and method

A portable, working distance technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of inability to achieve self-collimation and micro-angle measurement, reflected beam deviation from the entrance pupil, and the range cannot be too large.

Active Publication Date: 2016-12-21
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement
[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Method used

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  • Portable combined zero-setting laser large-working-distance auto-collimation device and method
  • Portable combined zero-setting laser large-working-distance auto-collimation device and method
  • Portable combined zero-setting laser large-working-distance auto-collimation device and method

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specific Embodiment 1

[0086] This embodiment is an embodiment of a portable combined zeroing laser large working distance self-collimation device.

[0087] The portable combined zeroing laser large working distance self-collimation device of this embodiment has a schematic structural diagram as shown in figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0088] The feedback imaging system 6 includes an image sensor imaging system and a fo...

specific Embodiment 2

[0095] This embodiment is an embodiment of a portable combined zeroing laser large working distance self-collimation device.

[0096] The portable combined zero-adjustment laser large working distance self-collimation device of this embodiment differs from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of this embodiment is one of the following two forms :

[0097] First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Figure 8 Shown; Described guide rail 68 has two stop positions altogether, and a stop position makes image sensor 65 image plane centers correspond to the focus position of reflective collimating mirror 22, and another stop position makes four-quadrant detector 66 image plane centers correspond to reflective The focus position of the collimating mirror 22;

[0098] Sec...

specific Embodiment 3

[0099] This embodiment is an embodiment of a portable combined zeroing laser large working distance self-collimation device.

[0100] The portable combined zeroing laser large working distance self-collimation device of this embodiment has a schematic structural diagram as shown in Figure 10 shown. On the basis of the specific embodiment 1, the portable combined zeroing laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0101] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary refl...

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Abstract

The invention belongs to the fields of precise measurement and optical engineering, and specifically relates to a portable combined zero-setting laser large-working-distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflector, and a feedback imaging system. The method comprises the steps: enabling a reflected light beam to return to the center of the imaging plane of the feedback imaging system through adjusting the reflector, and obtaining the angle change of the surface of a measured object through employing an angle deflection measurement device on the reflector. According to the invention, the reflector is added to a conventional auto-collimation angle measurement system, so the device can solve a problem that the reflected light of the measured object cannot be measured because the reflected light deflects from the measurement system, enlarges the auto-collimation working range under the condition of the same working distance or increases the working distance under the condition of the same auto-collimation working range. In addition, the specific design of the collimating mirror, the feedback imaging system and the reflector enables the device to be small and portable, and to be high in measurement precision. The device still can carry out measurement in an unstable measurement environment, and can achieve quick measurement.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a portable combined zeroing laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meter...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 谭欣然石剑于洋王超谭久彬
Owner HARBIN INST OF TECH
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