Chip assembly for in-situ measurement of solid-liquid interface electrochemical reaction

Abstract

The present invention discloses a chip assembly for in-situ measurement of a solid-liquid interface electrochemical reaction. The chip assembly comprises a first electrode (310), a second electrode (320), a first insulating film (510), a second insulating film (520), a third insulating film (530), a fourth insulating film (540), an upper chip (100) and a lower chip (200), wherein the upper chip (100) and the lower chip (200) are arranged opposite to each other, both sides of the upper chip (100) and the lower chip (200) are correspondingly sealed and combined, the upper chip (100) is provided with a through hole (110), the first insulating film (510) under the through hole (110) is provided with the first electrode (310), the lower chip (200) is provided with a concave groove (210) opposite to the through hole (110), and the fourth insulating film (540) on one side of the concave groove (210) is provided with the second electrode (320). According to the present invention, the special sample rod is not required, such that the test cost is substantially reduced; and with the grid structure of the first electrode (310), the morphological change of the sample to be measured is easily observed.

Description

technical field [0001] The invention belongs to the technical field of scanning electron microscope testing devices, and in particular relates to a chip component for in-situ measuring solid-liquid phase interface electrochemical reaction. Background technique [0002] The study of solid-liquid interface, because of its importance in biology, chemistry and interface science, has always been a research hotspot in the scientific circles at home and abroad. With the rise of nanomaterials science in recent years, more and more research results show that the nanostructure of materials has a key influence on their properties. Scanning electron microscopy (SEM) is a powerful tool for characterizing the surface structure of materials, which can analyze and obtain information such as high-resolution materials at the atomic level, surface morphology changes of samples, and energy spectra of chemical elements. Moreover, SEM has far lower requirements for liquid chip size than TEM liqu...

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Problems solved by technology

However, the existing SEM chips suitable for special solid-liquid test sample rods have two main disadvantages: (1) the cost is high; customers who use this technology need to purchase special sample rods, and the price of special sample rods is at least 100,000 RMB The above greatly limits the scope of popularization of this technology; (2) the processing requirements for the liquid chip are relatively high; because this technology utilizes a special sample bar to place the liquid chip, the size and structure of the liquid chip need to be consistent with the sample bar. pair

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