System wave aberration detection method capable of calibrating system errors
A detection method and system error technology, applied in the field of optical detection, can solve problems such as difficulty in implementation, and achieve the effects of improving measurement accuracy, being easy to implement, and improving measurement accuracy
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[0038] In order to solve the problem that the existing interferometry method causes systematic errors in the measurement results and affects the detection accuracy, the present invention proposes a systematic wave aberration detection method capable of calibrating the systematic errors.
[0039] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0040] see figure 1 , figure 1 A flow chart of a method for detecting systematic wave aberration capable of calibrating systematic errors according to an embodiment of the present invention is shown. The system wave aberration detection method includes:
[0041] Step A: Using the shearing interference detection system to detect the projected projection objective lens to obtain the systematic wave aberration of the projected projection ...
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