Coupling resonance type resonant strain sensor

A strain sensor and coupled resonance technology, applied in the field of stress sensor devices, can solve the problem of difficult electromagnet packaging, and achieve high Q value, wide application prospects, and good long-term stability.

Active Publication Date: 2017-01-11
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology

However, this structure must use electromagnetic drive and electromagnetic detection. When used as a strain sensor, the packaging of the electromagnet is difficult

Method used

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  • Coupling resonance type resonant strain sensor
  • Coupling resonance type resonant strain sensor
  • Coupling resonance type resonant strain sensor

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Embodiment Construction

[0041] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0042] see Figure 1 to Figure 19 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed ar...

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Abstract

The invention provides a coupling resonance type resonant strain sensor, which comprises two sensitive girders, and a detection girder connected between the two sensitive girders. The two ends of each sensitive girder are fixed and supported. The sensitive girders are working in a force-sensitive transverse vibration mode correspondingly. The detection girder is working in a longitudinal vibration mode significant in integrated piezoresistive effect. The sensitive girders and the detection girder are together in coupling resonance. An external driving force drives the entire structure to vibrate at a coupling resonant frequency. The stress applied onto the sensitive girders changes the resonant frequency of the sensitive girders, so that the coupling resonant frequency of the entire structure is changed along with the changing resonant frequency of the sensitive girders. Based on the piezoresistive effect of the detection girder, the resonant frequency is measured, so that the stress value can be further measured. According to the technical scheme of the invention, the coupling resonance type resonant strain sensor is packaged in the vacuum state through the high-temperature process, and is high in Q value, high in resolution, high in sensitivity, and good in long-term stability. The coupling resonance type resonant strain sensor has a wide application prospect in the field of stress detection.

Description

technical field [0001] The invention relates to a stress sensing device, in particular to a coupled resonance resonant strain sensor. Background technique [0002] Strain sensor, also known as strain gauge (strain gauge), is a commonly used sensor, which uses the piezoresistive properties of elastic materials (metals, alloys, semiconductors or cermets) to detect the normal strain and shear strain of the measured structure. Widely used in structural health monitoring, covering fields such as civil engineering, machinery, aerospace, medical and wearable systems. [0003] Compared with traditional strain gauges, silicon-based resonant strain sensors have the characteristics of high sensitivity, small temperature drift, quasi-digital output, and strong anti-interference ability. They are a type of high-performance strain sensors. [0004] The basic principle of the resonant strain sensor is: the strain of the measured structure causes the stress of the resonant structure to cha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/16
Inventor 杨恒魏文杉刘大洋李昕欣
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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