Array zero setting high-dynamic-accuracy long-working-distance auto-collimation device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to an array zero setting high-dynamic-accuracy long-working-distance auto-collimation device and method. The device comprises a light source, a collimating mirror, a reflector and a feedback imaging system. The method is characterized in that the reflector is adjusted, so that reflected light beams return to the image plane center of the feedback imaging system, and angle change of the surface of a measured object is obtained by an angular deflection measuring device on the reflector. As the reflector is added to a traditional auto-collimation angle measuring system, the problem of incapability of measuring the measured object with reflected light deviating from the measuring system can be avoided, auto-collimation working range is widened in the same working distance, or the advantages of the working distance are increased within the same auto-collimation working range. Besides, by the specific design of the collimating mirror, the feedback imaging system, the reflector and the like, the device has the advantages of simple structure, low manufacturing cost and capabilities of monitoring the assembly process of the measured object in the whole course and rapidly measuring the measured object.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to an array zeroing high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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