Seeding and shoulder expanding device and technique for single crystal rods and single crystal furnace
A single crystal rod and single crystal furnace technology, which is applied in the field of single crystal silicon manufacturing, can solve the problems of not ensuring stable temperature change, delay and oscillation, increasing seeding and shoulder placement time, etc.
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[0032] Example 1: Polished molybdenum sheet, with an outer diameter of 175mm, an included angle of 180 degrees, and a distance of 300mm from the surface of the silicon liquid, installed on the weight of the Shangyu 100 single crystal furnace; the seeding crucible speed is 10rpm, and the seed crystal speed is 12rpm. The seeding length is 180mm; the rotation speed of the shoulder crucible is 10rpm, the seed crystal rotation speed is 10rpm, and the shoulder lifting speed is 0.8mm / min.
Example Embodiment
[0033] Example 2: Polished molybdenum sheet, with an outer diameter of 205mm, an included angle of 180 degrees, and a distance of 300mm from the surface of the silicon liquid, installed on the weight of the Shangyu 100 single crystal furnace; the seeding crucible rotation speed is 10rpm, the seed crystal rotation speed is 12rpm, The seeding length is 180mm; the rotation speed of the shoulder crucible is 10rpm, the seed crystal rotation speed is 10rpm, and the shoulder lifting speed is 0.8mm / min.
Example Embodiment
[0034] Example 3: Polished molybdenum sheet, with an outer diameter of 215 mm, an included angle of 180 degrees, and a distance of 300 mm from the surface of the silicon liquid, installed on the weight of the Shangyu 100 single crystal furnace; the seeding crucible rotation speed is 10 rpm, and the seed crystal rotation speed is 12 rpm. The seeding length is 180mm; the rotation speed of the shoulder crucible is 10rpm, the seed crystal rotation speed is 10rpm, and the shoulder lifting speed is 0.8mm / min.
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