Rapid complex topography measurement method

A measurement method and shape technology, applied in the field of shape measurement, can solve the problems of large impact on performance and low sampling rate of measurement data, and achieve the effects of small quantity, easy installation, and fast measurement speed

Active Publication Date: 2017-02-22
TIANJIN UNIV
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Problems solved by technology

However, the measurement data sampling rate of the above methods is relatively low, and only the basic shape of the surface topography (low-frequency information of the surface topography) can be obtained.
The contact profiler is only suitable for collecting roughness infor...

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Embodiment Construction

[0021] The invention combines white light interference and laser scanning methods to realize surface topography measurement in a large range and full frequency range. White light interferometry can quickly realize nanometer-precision measurement of surface topography in a small field of view. Due to the large number of sampling points for local measurement, it can achieve full-band surface information acquisition. For large-scale surface topography, multiple single-field data need to be spliced ​​and fused. However, due to the complex shape of the surface to be measured, how to reasonably plan the measurement path to achieve fast measurement and high-precision stitching is a difficult problem in realizing large-scale surface topography measurement by white light interferometry. Therefore, the introduction of the laser scanning method in the present invention can quickly predict the surface to be measured, fully understand the characteristic information of the surface to be mea...

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Abstract

The invention discloses a rapid complex topography measurement method. A measurement system involved in the rapid complex topography measurement method comprises a white light source 1, three beam-splitting prisms, a microscope eyepiece 5, a microscope objective 6, an interference objective 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10 and is provided with two measurement optical paths and a laser measurement optical path. The rapid complex topography measurement method includes: disposing the measurement system on a three-dimensional movement platform; focusing a laser measurement portion to a measured surface and subjecting the measured surface to point-by-point scanning measurement according to a spiral line or gate line mode so as to obtain a rough contour feature of the measured surface; focusing a white light interference portion to the measured surface, rapidly positioning a height measurement position of the white light measurement system by every position point of a white light interference measurement path according to a height variation of the obtained rough contour feature, and integrating data in all regions so as to obtain full-frequency-band topographic information of the measured surface.

Description

technical field [0001] The invention relates to a shape measurement method, in particular to the processing surface quality and shape detection in the manufacturing process of ultra-precision machined mechanical parts and optical components. Background technique [0002] Surface topography refers to the geometry of the interface between the object and the surrounding medium. The basic shape of the surface and surface defect parameters such as waviness, texture, and surface roughness together constitute the characteristics of the original topography of the object surface. The surface morphology formed by machining, surface treatment and other processes directly affects its function and performance. With the rapid development of the defense industry, aerospace and machinery manufacturing and other fields, the demand for ultra-precision machining parts is also increasing, and the surface morphology and structure of products are becoming more and more complex. Therefore, the mec...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 张效栋房丰洲曾臻高慧敏武光创
Owner TIANJIN UNIV
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