Microprobe scattering type terahertz waveband dielectric constant detecting device

A dielectric constant and detection device technology, applied in the field of terahertz technology applications, can solve the problems of inability to detect the dielectric constant of micro-nano-scale samples, detection accuracy, deficiency, and upper limit of resolution, and achieve high integration, Simplifies complex work and highly operable effects

Inactive Publication Date: 2017-02-22
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is that there is an upper limit in the resolution of the existing detection substances in the dielectric constant of the THz band, and the dielectric constant and detection accuracy of the micro-nano-scale samples cannot be detected.

Method used

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  • Microprobe scattering type terahertz waveband dielectric constant detecting device
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  • Microprobe scattering type terahertz waveband dielectric constant detecting device

Examples

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Effect test

Embodiment 1

[0070] A microprobe scattering type dielectric constant detection device in the terahertz band, comprising a first infrared laser 1, a second infrared laser 2, a front-end polarization-maintaining optical fiber 3, a coupling beam splitter 4, a rear-end polarization-maintaining optical fiber 5, and a THz Wave transmitting antenna 6, THz wave splitter 7, THz wave reflector 8, first actuating ceramic 9, micro-nano probe 11, second actuating ceramic 17, parabolic mirror 10, THz wave power detector 14, function The generator 16 and the lock-in amplifier 20 are composed; the THz wave reflector 8 and the first actuating ceramic 9 are bonded together by synthetic resin glue; the micro-nano probe 11 and the second actuating ceramic 17 are mechanically clamped by micro-bolts Connection; the focal point of the THz wave transmitting antenna 6, the center of the THz wave splitter 7 and the horizontal axis of the parabolic mirror 10 are on the same straight line; the center of the THz wave r...

Embodiment 2

[0083] A microprobe scattering type dielectric constant detection device in the terahertz band, comprising a first infrared laser 1, a second infrared laser 2, a front-end polarization-maintaining optical fiber 3, a coupling beam splitter 4, a rear-end polarization-maintaining optical fiber 5, and a THz Wave transmitting antenna 6, THz wave splitter 7, THz wave reflector 8, first actuating ceramic 9, micro-nano probe 11, second actuating ceramic 17, parabolic mirror 10, THz wave power detector 14, function The generator 16 and the lock-in amplifier 20 are composed; the THz wave reflector 8 and the first actuating ceramic 9 are bonded together by synthetic resin glue; the micro-nano probe 11 and the second actuating ceramic 17 are mechanically clamped by micro-bolts Connection; the focal point of the THz wave transmitting antenna 6, the center of the THz wave splitter 7 and the horizontal axis of the parabolic mirror 10 are on the same straight line; the center of the THz wave r...

Embodiment 3

[0085] A microprobe scattering type terahertz band dielectric constant detection device is characterized in that the calculation method of the dielectric constant (ε) of the substance to be measured is:

[0086]

[0087]

[0088] In the formula, k is the characteristic parameter value of the system; I x and I y Two orthogonal component signals at 2Ω-M and 2Ω-2M frequencies measured on a terahertz-band dielectric constant detection device for a standard sample with known dielectric function; α is the terahertz-band dielectric constant detection device The dielectric constant of the tip coating of the micro-nano probe 11 is a known value in the test; ε 0 is the dielectric constant of the standard sample, also known value; Ω is the vibration frequency of the micro-nano probe; r is the radius of curvature of the tip of the micro-nano probe 11; A is the vibration amplitude of the micro-nano probe 11 ;I' x and I' y are two orthogonal component signals of the sample to be t...

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Abstract

The invention provides a microprobe scattering type terahertz waveband dielectric constant detecting device. The microprobe scattering type terahertz waveband dielectric constant detecting device consists of a first infrared laser (1), a second infrared laser (2), a front-end polarization maintaining fiber (3), a coupling beam splitter (4), a rear-end polarization maintaining fiber (5), a THz wave transmitting antenna (6), a THz wave beam splitting plate (7), a THz wave reflector (8), a first motivation ceramic (9), a micro-nano probe (11), a second motivation ceramic (17), a paraboloidal mirror (10), a THz wave power detector (14), a function generator (16) and a lock-in amplifier (20). Signals which are related to samples can be acquired accurately, and the dielectric constant of the samples is calculated by a calculating method based on a detection result. The microprobe scattering type terahertz waveband dielectric constant detecting device has the characteristics of high resolution ratio, high flexibility and high operationality, has ability of testing on a plurality of frequency bands and frequency points, and brings convenience for multi-disciplinary research on mesoscale.

Description

technical field [0001] The invention relates to the application field of terahertz (THz) technology, in particular to a microprobe scattering-type terahertz band sample permittivity detection device at the mesoscopic scale. Background technique [0002] THz technology is an emerging science and technology. Many materials, structures or biological macromolecules have unique fingerprint spectrum responses in the THz band, and these characteristics are not available in other electromagnetic bands, so they can be used as an important tool for material identification and identification. means. Among them, the detection of dielectric constant is one of the important methods of material identification. In addition, it is also of great significance to study the process of material change (such as biological tissue or cell) according to the dielectric constant. [0003] At present, to detect the dielectric constant of a substance in the THz band, it is necessary to use a far-field T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R27/26
CPCG01R27/2682
Inventor 代广斌王化斌耿国帅杨忠波崔洪亮常天英魏东山张瑾杜春雷
Owner JILIN UNIV
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