Frequency stabilization apparatus and method for laser interferometer

Abstract

The invention provides a frequency stabilization apparatus for a laser interferometer. The frequency stabilization apparatus comprises a circuit control system, a laser, a guiding light path, a frequency-stabilizing light path, and a laser output light path. The guiding light path guides light emitted by the laser to the frequency-stabilizing light path. And the frequency-stabilizing light path consists of a first spectroscope, a second spectroscope, and a photocell. In addition, the invention also provides a frequency stabilization method for a laser interferometer. The apparatus and the method have the following beneficial effects: on the basis of the design of frequency-stabilizing light splitting, the proportion of light for frequency stabilization in the laser is low, so that the energy loss of the frequency-stabilizing part is extremely low and thus the working laser strength is enhanced substantially; because of the angle and dimension design of the first spectroscope, the influence on the frequency-stabilizing precision by stray light can be reduced substantially; the frequency-stabilizing light splitting adjustment becomes convenient; the structure is simple and is easy to implement; the structure is compact and is easy to mechanical packaging; and the precision and reliability of frequency-stabilizing data can be guaranteed based on the symmetric optic and electronic design.

Description

technical field [0001] The invention relates to a frequency stabilizing device, in particular to a frequency stabilizing device and method for a laser interferometer. Background technique [0002] A laser interferometer is an optical measuring instrument that uses light wave interferometry to measure linear displacement. The frequency-stabilized laser is the core component, and the frequency-stabilized performance of the laser is directly related to the performance of the entire instrument. At present, there are mainly the following methods for laser frequency-stabilized, such as figure 1 and figure 2 shown. [0003] The frequency-stabilized laser is mainly to stabilize the cavity length of the laser. The general method is to use a part of the output light intensity of the laser as feedback, monitor the change of its output through a photodetector, or actively or passively adjust the working cavity length of the laser. In our industrial lasers, especially helium-neon las...

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Problems solved by technology

[0008] 1. Using the thermal frequency stabilization method of taillight frequency stabilization, it is inevitable that there will be some stray light, which will affect the accuracy of frequency stabilization

[0009] 2. The effect of using part of the working light to stabilize the frequency is good, but the ratio of light splitting in the frequency stabilization and the ratio of the S light component and the P light component in the split light are difficult to control

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