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Graphene film transfer equipment and transfer method thereof

A graphene film and transfer equipment technology, applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve problems such as affecting the flatness of graphene films, avoid wrinkles and overlaps, achieve contact, and improve uniformity. Effect

Active Publication Date: 2017-05-10
山东南山科学技术研究院有限公司
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Problems solved by technology

However, when the graphene film is peeled off from the copper foil by electrolysis, the graphene loses the rigid supporting force of the copper foil to form a free flexible state, so that the graphene film will be separated from the copper foil due to The sudden disappearance of the rigid support force forms wrinkles and overlaps locally, which affects the flatness of the graphene film

Method used

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  • Graphene film transfer equipment and transfer method thereof
  • Graphene film transfer equipment and transfer method thereof
  • Graphene film transfer equipment and transfer method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] refer to Figure 1-6, the present embodiment includes an electrolytic cell, a dissolution tank and a transfer device 1, the electrolytic cell is provided with a first hydraulic lifting rod 2 connected to the transfer device 1, the transfer device 1 includes a circular housing 3, and the bottom of the housing 3 An elastic film 4 is fixedly connected, an air hole 5 is provided on the top of the housing 3, a second hydraulic lifting rod 6 is provided at the center of the top of the housing 3, and a circular pressure plate 7 is fixed on the bottom of the second hydraulic lifting rod 6, and the circular pressure plate 7 is fixed on the bottom of the second hydraulic lifting rod 6. The edge of the pressure plate 7 is provided with an outwardly inclined inclined surface 8, with the second hydraulic lifting rod 6 as the center, three third hydraulic lifting rods 9 are arranged circularly on the top of the housing 3, and the third hydraulic lifting rod 9 A bracket 10 is pivotall...

Embodiment 2

[0045] This embodiment is improved on the basis of Embodiment 1.

[0046] refer to Figure 7 A plurality of clamping bodies 37 are arranged on the outside of the housing 3 , and adjusting bolts 38 are provided between the clamping bodies 37 and the housing 3 . The elastic membrane 4 is fixed on the clamping body 37 through the clamping bolt 41 , and the surface tension of the elastic membrane 4 can be adjusted by adjusting the adjusting bolt 38 . When the circular pressure plate 7 and the first pressure block 13 and the second pressure block 15 are pressed down, the adjustment bolt 38 can be adjusted to realize the fine adjustment of the local tension imbalance of the elastic membrane.

Embodiment 3

[0048] This embodiment is improved on the basis of Embodiment 2.

[0049] refer to Figure 8 , the outer side of the inclined portion 8 is connected with the pressing piece 39 through the fifth spring body 40 . The pressing piece 39 is arranged on the central axis between the two third hydraulic lifting rods 9 . The pressing piece 39 can balance the down pressure of the pressing blocks on both sides, and reduce the difference in the down pressure on the surface of the elastic membrane between different third hydraulic lifting rods 9 .

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Abstract

The invention discloses graphene film transfer equipment, which comprises an electrolysis pool, a dissolution pool and a transfer device, wherein a first hydraulic ascending and descending rod connected with the transfer device is arranged outside the electrolysis pool; the transfer device comprises a round casing; the bottom of the casing is fixedly connected with an elastic film; a second hydraulic ascending and descending rod is arranged in the center of the top of the casing; the bottom of the second hydraulic ascending and descending rod is fixedly provided with a round press disc; by using the second hydraulic ascending and descending rod as the center, three third hydraulic ascending and descending rods are annularly distributed on the top of the casing; support frames are coupled onto the bottoms of the third hydraulic ascending and descending rods; a first support part and a second support part are arranged at the bottom of each support frame; a first press block is fixed on the bottom of the first support part; the bottom of the second support part is connected with a second press block through a first spring body. The invention also discloses a transfer method using the graphene film transfer equipment. The graphene film transfer equipment and the transfer method have the advantages that the defects in the prior art can be overcome, and the flatness after a graphene film is transferred on a copper foil can be improved.

Description

technical field [0001] The invention relates to the technical field of graphene materials, in particular to a graphene film transfer device and a transfer method thereof. Background technique [0002] Graphene is a single-atom layer two-dimensional crystal in which carbon atoms are closely packed in a hexagonal structure, and the intrinsic mobility of carriers can reach 2×10 5 cm 2 / (V·S), this excellent electrical property makes it have great application value in high-frequency electronic devices. In order to fabricate graphene electronic devices, the primary problem is to prepare large-scale graphene films with excellent electrical properties and transfer them to suitable target substrates. In the prior art, using CVD to deposit graphene films is a relatively mature production method for graphene films. When using CVD to deposit graphene thin films, a copper foil substrate is required. When separating the graphene film, it is necessary to etch the copper foil. Chinese...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B32/194
Inventor 李恕广李泰胧
Owner 山东南山科学技术研究院有限公司
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