Mask film plate and manufacturing method thereof

Abstract

The invention discloses a mask film plate and a manufacturing method thereof. The mask film plate is used for evaporating a display substrate, and comprises a pattern part and a stress buffer part, wherein the pattern part corresponds to a display area of the display substrate; the stress buffer part corresponds to at least one part of a non-display area of the display substrate; multiple first grooves are formed in one side of the stress buffer part; multiple second grooves are formed in the other side of the stress buffer part; and first projections of the first grooves on the plane where the mask film plate is located do not intersect with second projections of the second grooves on the plane where the mask film plate is located. The quality of the mask film plate in the evaporating process is guaranteed, so that the effect of improving the AMOLED product quality is achieved.

Description

Technical field [0001] The invention relates to the field of display technology, in particular to a mask and a manufacturing method thereof. Background technique [0002] OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) is a carrier double injection light emitting device, which emits light from electrons injected by electrodes under the driving of an external voltage. By adjusting the external voltage, the brightness of each red, green, and blue LED can be changed, and various colors of light can be obtained. OLED has the following advantages: (1) simple structure, because it does not require a backlight, it can be made as thin as paper; (2) true color, because it is a light-emitting body, the light-emitting color can achieve pure color saturation, And in the temperature range between minus 45 degrees Celsius and above zero degrees Celsius, the color will not change. Unlike liquid crystal technology, the color will change with the change of temperature or viewin...

AI Technical Summary

Problems solved by technology

[0005] However, because the thickness of the FMM is very thin, it is prone to wrinkles during the stretching process, and the wrinkles will be intensified when it is attracted by the magnetic field in the evaporation chamber, resulting in poor surface flatness of the FMM, especially for the surface closest to the frame. Panel, its adhesion to the glass substrate varies greatly at different positions, which eventually leads to the fact that the organic material is not evaporated to the position that should be evaporated, resulting in color mixing when the Panel is lit

[0006] It can be seen that the quality of FMM used in the evaporation process is difficult to control, and this shortcoming has become one of the main bottlenecks restricting the development of AMOLED technology.

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