Flexible OLED display and manufacturing method thereof

A manufacturing method and display technology, applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve the problem of affecting the packaging effect of flexible OLED displays, increasing light loss of flexible OLED displays, increasing edge stress of packaging structures, etc. problem, achieve the effect of improving the light extraction ability, reducing the water vapor transmission rate, and reducing the edge stress

Active Publication Date: 2017-05-10
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
6 Cites 11 Cited by

AI-Extracted Technical Summary

Problems solved by technology

Due to the slow deposition rate of ALD, PECVD is often used to deposit the barrier layer. However, due to technical limitations, the barrier layer produced by PECVD mostly has needle-shaped holes and has limited water vapor barrier capability (water vapor transmission rate of 10 -4 g/(m 2 24h))
In order to achieve a water vapor barrier packaging effect comparable to that of glass packaging (water vapor transmission rate-6 g/(m 2 24h)), the common practice is to deposit more layers of packaging film, and set the size of the barrier layer larger than the size of the buffer layer below it, so that the barrier layer ...
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Method used

In summary, the flexible OLED display of the present invention comprises an OLED device disposed on a flexible substrate, a barrier layer covering the OLED device, a water-absorbing buffer layer disposed on the barrier layer, and a water-absorbing buffer layer disposed on the water-absorbing The light extraction enhancement buffer layer on the buffer layer, the water absorption buffer layer is doped with water absorption particles, the light extraction enhancement buffer layer is doped with refraction particles, the barrier layer, the water absorption buffer layer, and the light extraction enhancement buffer The size of the area covered by the layers is the same, and the OLED device is packaged together as a packaging structure. Compared with the prior art, the water vapor transmission rate of the water-absorbing buffer layer made of organic materials is reduced, and the utilization rate of the water-absorbing buffer layer is improved. It can greatly improve the packaging effect of the flexible OLED display, thereby increasing the service life of the flexible OLED display, improving the light extraction ability of the flexible OLED display, improving the quality of the product, reducing the stress on the edge of the packaging structure, and improving the reliability of the product. According to the manufacturing method of the flexible OLED display of the present invention, the packaging structure of the flexible OLED display produced has small edge stress, strong water vapor barrier ability, good packaging effect, long service life and strong light extraction ability.
It should be noted that the above-mentioned flexible OLED display is doped with water-absorbing particles in the water-absorbing buffer layer 220, and is doped with refraction particles in the light extraction enhancing buffer layer 230, and the barrier layer 210, water-absorbing The size of the area covered by the buffer layer 220 and the light extraction enhancing buffer layer 230 is the same, and they are used as a packaging structure to package the OLED device 100. The water-absorbing particles doped in the water-absorbing buffer layer 220 can effectively reduce the water-absorbing buffer layer made of organic materials. The water vapor transmission rate of 220 greatly improves the water-blocking efficiency of the water-absorbing buffer layer 220, which can be used to block water vapor, improves the utilization rate of the water-absorbing buffer layer 220, greatly improves the packaging effect of the flexible OLED display, and prevents external water vapor from invading the OLED. The device 100 makes it invalid, thereby improving the service life of the flexible OLED display; the doped refraction particles in the light extraction enhancement buffer layer 230 can refract the light emitted by the OLED device 100, improve the light extraction ability of the flexible OLED display, and prevent Due to the excessive film layers of the packaging structure, the light loss of the flexible OLED display is generated, and the quality of the product is improved; because the water-absorbing buffer layer 220 has the function of blocking water vapor, there is no need to set a packaging structure with too many film layers, and the barrier layer 210, water-absorbing bu...
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Abstract

The invention provides a flexible OLED display and a manufacturing method thereof. The flexible OLED display comprises an OLED device arranged on a flexible substrate, a barrier layer covering the OLED device, a water-absorbing buffer layer arranged on the barrier layer, and a light-extraction enhanced buffer layer arranged on the water-absorbing buffer layer, wherein the water-absorbing buffer layer is doped with water-absorbing particles; the light-extraction enhanced buffer layer is doped with refraction particles; and the areas covered by the barrier layer, the water-absorbing buffer layer and the light-extraction enhanced buffer layer are the same in size and are used for packaging the OLED device as a packaging structure in common. Compared with the prior art, the flexible OLED display has the advantages that the water vapor transmission rate of the water-absorbing buffer layer manufactured by an organic material is reduced, the utilization rate of the water-absorbing buffer layer is improved and the packaging effect of the flexible OLED display can be greatly improved, so that the service life of the OLED display is prolonged; and meanwhile, the light extraction ability of the flexible OLED display is improved and the quality and the reliability of a product are improved.

Application Domain

Final product manufactureSolid-state devices +3

Technology Topic

Transmission rateUtilization rate +3

Image

  • Flexible OLED display and manufacturing method thereof
  • Flexible OLED display and manufacturing method thereof
  • Flexible OLED display and manufacturing method thereof

Examples

  • Experimental program(1)

Example

[0051] The present invention provides a flexible OLED display, please refer to figure 2 , Is the first embodiment of the flexible OLED display of the present invention, and includes a flexible substrate (not shown), an OLED device 100 provided on the flexible substrate, a barrier layer 210 covering the upper surface and sides of the OLED device 100, A water absorption buffer layer 220 provided on the barrier layer 210, and a light extraction enhancement buffer layer 230 provided on the water absorption buffer layer 220;
[0052] The water-absorbing buffer layer 220 includes a first organic material and water-absorbing particles doped in the first organic material;
[0053] The light extraction enhancement buffer layer 230 includes a second organic material and refractive particles doped in the second organic material;
[0054] The size of the area covered by the barrier layer 210, the water absorption buffer layer 220, and the light extraction enhancement buffer layer 230 are the same.
[0055] Specifically, the material of the barrier layer 210 adopts the inorganic material used in the barrier layer in the existing thin film packaging technology. Specifically, the material of the barrier layer 210 may be silicon nitride (SiN x ), silicon oxide (SiO x ), or alumina (Al 2 O 3 ).
[0056] Specifically, the thickness of the barrier layer 210 is 0.5 μm-1 μm.
[0057] Specifically, the water-absorbing particles have water-absorbing and water-locking functions, and the materials are selected from materials that are chemically stable, have the same physical and chemical properties after being heated and absorbed, and have good light transmittance. Specifically, the material of the water-absorbing particles can adopt existing technology Commonly used materials with water absorption and water retention function, for example, calcium oxide or barium oxide can be used.
[0058] Specifically, the size of the water-absorbing particles is on the order of nanometers.
[0059] Specifically, the total volume of the water-absorbing particles in the water-absorbing buffer layer 220 accounts for 5%-20% of the total volume of the water-absorbing buffer layer 220.
[0060] Specifically, the first organic material is an organic material used for flexible packaging in the prior art. Specifically, the first organic material may be silane, acrylic, or epoxy.
[0061] Specifically, the thickness of the water-absorbing buffer layer 220 is 1 μm-10 μm, and it is sufficient to ensure that the film-forming thickness of the water-absorbing buffer layer 220 is uniform.
[0062] Specifically, the refractive particles have the function of refracting the light emitted by the OLED device 100, and their materials are selected to have high refractive index, stable chemical properties, and unchanged physical and chemical properties after being heated. Specifically, the material of the refractive particles may be zirconia or diamond.
[0063] Specifically, the size of the refractive particles is on the order of nanometers.
[0064] Specifically, the ratio of the total volume of the refractive particles in the light extraction enhancement buffer layer 230 to the total volume of the light extraction enhancement buffer layer 230 is 5%-20%.
[0065] Specifically, the second organic material is an organic material used for flexible packaging in the prior art. Specifically, the second organic material may be silane, acrylic, or epoxy.
[0066] Specifically, the first organic material and the second organic material may be the same or different.
[0067] Specifically, the thickness of the light extraction enhancement buffer layer 230 is 1 μm-10 μm, and the thickness of the film formation of the light extraction enhancement buffer layer 230 is uniform.
[0068] It should be noted that in the above-mentioned flexible OLED display, the water-absorbing buffer layer 220 is doped with water-absorbing particles, the light extraction enhancement buffer layer 230 is doped with refractive particles, the barrier layer 210, the water-absorbing buffer layer 220 , And the size of the area covered by the light extraction enhancement buffer layer 230 are the same, together as a packaging structure to encapsulate the OLED device 100, the water absorption particles doped in the water absorption buffer layer 220 can effectively reduce the water vapor of the water absorption buffer layer 220 made of organic materials The transfer rate greatly improves the water blocking efficiency of the water absorption buffer layer 220, which can be used to block water vapor, improve the utilization rate of the water absorption buffer layer 220, greatly improve the packaging effect of the flexible OLED display, and prevent external water vapor from invading the OLED device 100 Its failure, thereby increasing the service life of the flexible OLED display; the doped refractive particles in the light extraction enhancement buffer layer 230 can refract the light emitted by the OLED device 100, improve the light extraction capability of the flexible OLED display, and prevent the encapsulation structure Excessive film layers cause the light loss of the flexible OLED display, and improve the quality of the product; because the water-absorbing buffer layer 220 has the effect of blocking water vapor, there is no need to provide a packaging structure with too many layers, and the barrier layer 210, the water-absorbing buffer layer 220, The size of the area covered by the light extraction enhancement buffer layer 230 is the same, which can effectively reduce the stress on the edge of the package structure, prevent the flexible OLED display from breaking, and improve the reliability of the product.
[0069] See image 3 , Is the second embodiment of the flexible OLED display of the present invention. The difference between this embodiment and the first embodiment is that the flexible OLED display further includes another layer arranged on the light extraction enhancement buffer layer 230 and overlapped in sequence. One layer of water absorption buffer layer 220 and another layer of light extraction enhancement buffer layer 230 further improve the packaging effect of the flexible OLED display. The rest are the same as the first embodiment, and will not be repeated here. Of course, according to the actual design requirements of the product, a multilayer water-absorbing buffer layer 220 and a multilayer light-extraction-enhanced buffer layer 230 can also be sequentially overlapped on the light extraction enhancement buffer layer 230, without affecting the implementation of the present invention.
[0070] See Figure 4 , Is the third embodiment of the flexible OLED display of the present invention. The difference between this embodiment and the first embodiment is that the flexible OLED display further includes another layer arranged on the light extraction enhancement buffer layer 230 and overlapped in sequence. One layer of barrier layer 210, another layer of water absorption buffer layer 220, and another layer of light extraction enhancement buffer layer 230 further improve the packaging effect of the flexible OLED display. The rest are the same as those of the first embodiment, and will not be repeated here. Of course, according to the actual design requirements of the product, a multilayer barrier layer 210, a multilayer water absorption buffer layer 220, and a multilayer light extraction enhancement buffer layer 230 can also be sequentially overlapped on the light extraction enhancement buffer layer 230. Affect the realization of the present invention.
[0071] See Figure 5 Based on the above-mentioned flexible OLED display, the present invention also provides a method for manufacturing a flexible OLED display, including the following steps:
[0072] Step 1. Provide a flexible substrate (not shown), and form the OLED device 100 on the flexible substrate.
[0073] Step 2. A mask (not shown) is provided, and inorganic materials are deposited using the mask as a shield to form a barrier layer 210 covering the upper surface and side surfaces of the OLED device 100.
[0074] Specifically, the inorganic material is the inorganic material used in the barrier layer in the existing thin-film packaging technology. Specifically, the inorganic material may be SiN x , SiO x , Or Al 2 O 3.
[0075] Specifically, the step 2 deposits the inorganic material by ALD or PECVD method.
[0076] Specifically, the thickness of the barrier layer 210 formed in the step 2 is 0.5 μm-1 μm.
[0077] Step 3. Provide water-absorbing particles and a first organic material, mix the water-absorbing particles in the first organic material uniformly to form a first mixture, and coat the first mixture on the barrier layer 210 with the mask as a shield to form a water-absorbing buffer 层220.
[0078] Specifically, the first organic material is an organic material used for flexible packaging in the prior art. Specifically, the first organic material may be silane, acrylic, or epoxy.
[0079] Specifically, the water-absorbing particles have water-absorbing and water-locking functions, and the materials are selected from materials that are chemically stable, have the same physical and chemical properties after being heated and absorbed, and have good light transmittance. Specifically, the material of the water-absorbing particles can adopt existing technology Commonly used materials with water absorption and water retention function, for example, calcium oxide or barium oxide can be used.
[0080] Specifically, the size of the water-absorbing particles is on the order of nanometers.
[0081] Specifically, in the step 3, the water-absorbing particles are uniformly mixed in the first organic material by means of mechanical stirring and ultrasound.
[0082] Specifically, in the step 3, the first mixture is coated on the barrier layer 210 by inkjet printing (IJP) or spin coating (Spin Coating).
[0083] Specifically, the total volume of the water-absorbing particles in the water-absorbing buffer layer 220 formed in step 3 accounts for 5%-20% of the total volume of the water-absorbing buffer layer 220.
[0084] Specifically, the thickness of the water-absorbing buffer layer 220 formed in step 3 is 1 μm-10 μm.
[0085] Step 4. Provide refractive particles and a second organic material, mix the refractive particles uniformly in the second organic material to form a second mixture, and use the mask as a shield to coat the second mixture on the water-absorbing buffer layer 220 to form a light The enhanced buffer layer 230 is extracted.
[0086] Specifically, the second organic material is an organic material used for flexible packaging in the prior art. Specifically, the second organic material may be silane, acrylic, or epoxy;
[0087] Specifically, the first organic material and the second organic material may be the same or different.
[0088] Specifically, the refractive particles have the function of refracting the light emitted by the OLED device 100, and their materials are selected to have high refractive index, stable chemical properties, and unchanged physical and chemical properties after being heated. Specifically, the material of the refractive particles may be zirconia or diamond.
[0089] Specifically, the size of the refractive particles is on the order of nanometers.
[0090] Specifically, in the step 4, the second mixture is coated on the water absorption buffer layer 220 by inkjet printing or spin coating.
[0091] Specifically, the ratio of the total volume of the refractive particles in the light extraction enhancement buffer layer 230 formed in the step 4 to the total volume of the light extraction enhancement buffer layer 230 is 5%-20%.
[0092] Specifically, the thickness of the light extraction enhancement buffer layer 230 formed in the step 4 is 1 μm-10 μm.
[0093] It should be noted that, in the manufacturing method of the above-mentioned flexible OLED display, the water-absorbing buffer layer 220 is doped with water-absorbing particles, and the light extraction enhancement buffer layer 230 is doped with refractive particles. The barrier layer 210 is The buffer layer 220 and the light extraction enhancement buffer layer 230 are made of the same mask, and the size of the covered area is the same. They are used as a packaging structure to encapsulate the OLED device 100. The water absorption particles doped in the water absorption buffer layer 220 can effectively reduce The water vapor transmission rate of the water absorption buffer layer 220 made of organic materials greatly improves the water blocking efficiency of the water absorption buffer layer 220, which can be used to block water vapor, improve the utilization rate of the water absorption buffer layer 220, and greatly improve the performance of the flexible OLED display. The encapsulation effect prevents external water vapor from invading the OLED device 100 to make it invalid, thereby improving the service life of the flexible OLED display; the doped refractive particles in the light extraction enhancement buffer layer 230 can refract the light emitted by the OLED device 100 and improve flexibility The light extraction capability of the OLED display prevents the light loss of the flexible OLED display due to excessive film layers of the packaging structure, and improves the quality of the product; because the water absorption buffer layer 220 has the effect of blocking water vapor, there is no need to provide a packaging structure with too many layers And the size of the area covered by the barrier layer 210, the water absorption buffer layer 220, and the light extraction enhancement buffer layer 230 are the same, which can effectively reduce the stress on the edge of the package structure, prevent the flexible OLED display from breaking, and improve the reliability of the product.
[0094] Optionally, the manufacturing method of the flexible OLED display further includes:
[0095] Step 6. Use the mask as a shield to coat the first mixture on the light extraction enhancement buffer layer 230 to form a water absorption buffer layer 220.
[0096] Step 7. Use the mask as a shield to coat the second mixture on the water-absorbing buffer layer 220 to form a light extraction enhanced buffer layer 230.
[0097] It should be noted that by continuing to form the water absorption buffer layer 220 and the light extraction enhancement buffer layer 230 on the light extraction enhancement buffer layer 230, the packaging effect of the flexible OLED display can be further improved. Of course, steps 6 and 7 can be repeated. Next, multiple layers of water absorption buffer layer 220 and multiple layers of light extraction enhancement buffer layer 230 are repeatedly overlapped to enhance the packaging effect.
[0098] Optionally, the manufacturing method of the flexible OLED display further includes:
[0099] Step 6', depositing an inorganic material on the light extraction enhancement buffer layer 230 using the mask as a shield to form a barrier layer 210;
[0100] Step 7', coating the first mixture on the barrier layer 210 with the mask as a shield to form a water absorption buffer layer 220;
[0101] Step 8', using the mask as a shield, coat the second mixture on the water-absorbing buffer layer 220 to form a light extraction enhanced buffer layer 230.
[0102] It should be noted that by continuing to form the barrier layer 210, the water absorption buffer layer 220, and the light extraction enhancement buffer layer 230 on the light extraction enhancement buffer layer 230, the packaging effect of the flexible OLED display can be further improved. Of course, step 6'can also be repeated. Step 7', and step 8'are repeatedly overlapped to form a multilayer barrier layer 210, a water absorption buffer layer 220, and a multilayer light extraction enhancement buffer layer 230 to enhance the packaging effect.
[0103] In summary, the flexible OLED display of the present invention includes an OLED device provided on a flexible substrate, a barrier layer covering the OLED device, a water absorption buffer layer provided on the barrier layer, and a water absorption buffer layer provided on the water absorption buffer layer The light extraction enhancement buffer layer, the water absorption buffer layer is doped with water absorbing particles, the light extraction enhancement buffer layer is doped with refractive particles, and the barrier layer, the water absorption buffer layer, and the light extraction enhancement buffer layer are covered The size of the area is the same, and the OLED device is packaged together as an encapsulation structure. Compared with the prior art, the water vapor transmission rate of the water absorption buffer layer made of organic materials is reduced, and the utilization rate of the water absorption buffer layer is improved, which can greatly improve The encapsulation effect of the flexible OLED display, thereby increasing the service life of the flexible OLED display, at the same time improving the light extraction capability of the flexible OLED display, improving the quality of the product, and reducing the stress on the edge of the packaging structure, and improving the reliability of the product. In the method for manufacturing the flexible OLED display of the present invention, the edge stress of the packaging structure of the prepared flexible OLED display is small, the water vapor barrier capability is strong, the packaging effect is good, the service life is long, and the light extraction capability is strong.

PUM

PropertyMeasurementUnit
Thickness0.5 ~ 1.0µm
Thickness1.0 ~ 10.0µm

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