A metal hose connection structure

Abstract

The present invention relates to the technical field of semiconductor equipment, in particular to a metal hose connection structure, which can be provided by setting a positioning pin on the hose joint of the metal hose structure, and setting the positioning pin on the manifold joint of the inlet and outlet manifold Matching gap; in the process of rotating the nut, the positioning pin can be used to limit the frictional movement of the hose joint in the direction of nut rotation, thereby eliminating the movement of the metal hose body in the direction of nut rotation; it can also be used A plane bearing is installed on the metal straight pipe of the metal hose structure, so that during the process of rotating the nut, the movement of the hose joint in the direction of nut rotation is reduced through the plane bearing, thereby reducing the movement of the metal hose body in the direction of rotation of the nut. The movement of the nut in the direction of rotation; this connection structure not only reduces the risk of metal hose rupture and leakage due to rotational deformation, improves the service life of the metal hose body, but also prevents the hose joint and manifold joint from being unable to be fixed tightly. The phenomenon.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a metal hose (gas bellow) connection structure. Background technique [0002] Because the metal hose has good flexibility, temperature resistance, pressure resistance and corrosion resistance, it is suitable for the transportation of steam, water, oil and various industrial gases, medicines and other media. The metal hose plays an important role in the movement of the piping system, thermal expansion absorption, and vibration absorption. In the semiconductor furnace tube machine, the process gas is also introduced into the reaction tube through the metal hose for reaction, and the metal hose is fixed on the inlet and outlet manifold (manifold) by tightening the thread. [0003] At present, when the nut is rotated and locked to fix the metal hose body on the inlet and outlet manifolds, due to the rotational friction between the nut and the hose joint, the metal ho...

AI Technical Summary

Problems solved by technology

[0003] At present, when the nut is rotated and locked to fix the metal hose body on the inlet and outlet manifolds, due to the rotational friction between the nut and the hose joint, the metal hose body will be driven to rotate along the nut Rotating in the direction of the metal hose, the frictional rotation of the metal hose that should not have will cause two effects; the first effect is that after the hose joint rotates, the metal hose body undergoes rotational deformation, and multiple such rotational deformations cause the metal hose The service life of the body is shortened, which also increases the risk of rupture and leakage of the metal hose body during use

The second situation is that the metal hose body will rebound after being deformed to a limit angle, causing the metal hose joints to be unable to be fixed tightly, and even gas leakage may occur; these are not expected by those skilled in the art of

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