MEMS (Micro-electromechanical System) vector hydrophone with bicylindrical sensibilization structure

Abstract

The invention discloses an MEMS (Micro-electromechanical System) vector hydrophone with a bicylindrical sensibilization structure. A seal ring is clamped between a metal shielding case and a polyurethane jacket; a pre-amplifier is placed in the metal shielding case; a sensing unit is arranged in the polyurethane jacket; a vector direction position of the sensing unit is placed according to a set angle and is marked on the outer part; the sensing unit is pasted to an inner wall of the bicylindrical sensibilization structure, and is electrically connected with the pre-amplifier through a shielded conductor; the shielded conductor penetrates through a conductor connecting hole; an oil outlet hole is formed beside the conductor connecting hole; the bicylindrical sensibilization structure is arranged on a base of the polyurethane jacket; degassed castor oil fills a space between the polyurethane jacket and the bicylindrical sensibilization structure. According to the MEMS vector hydrophone with the bicylindrical sensibilization structure provided by the invention, the bicylindrical structure is utilized for improving the sensitivity of the vector hydrophone, a structure and a process of integral packaging of the sensing unit and a pre-amplifying circuit are provided for an underwater application environment, and a tandem type mirror image bridge pre-amplifying circuit structure is designed, so that the signal-to-noise ratio is improved.

Description

technical field [0001] The invention mainly relates to a novel hot-wire type MEMS vector hydrophone, in particular to a MEMS vector hydrophone with a double cylinder sensitization structure. Background technique [0002] As we all know, sound waves are the only known waves that can travel long distances in water, so the basis for ocean measurement is various underwater acoustic sensors, namely hydrophones. In naval battles, sonar is the five senses of sea combat individuals (various ships and boats). All underwater battlefield reconnaissance must use sonar as the media, which is indispensable. As one of the important components of the sonar system, the underwater acoustic transducer is an important research direction of underwater acoustics. The research on the new underwater acoustic transducer is a key content of the development of naval sonar technology, and its research work has important strategic significance . [0003] To describe a complete sound field, not only th...

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Problems solved by technology

[0005] At present, the co-vibration spherical vector hydrophone is widely used. Due to its relatively large size, the co-vibration spherical vector hydrophone must drift on the water surface when it is used as a vector array, which is difficult to control. In the Yuan Dynasty, multiple brackets were needed for fixing, and the process was relatively complicated; there is also the bionics-based MEMS piezoresistive vector hydrophone of North University of China, which imitates the lateral line mechanical sensing cells (sound hair cells) of fish to sense Based on the principle of water movement, a structural design of artificial hair cell vector hydrophone is proposed. When the sound wave penetrates the package shell and acts on the central cilium (made of rigid plastic cylinder), the rigid plastic cylinder is the same as the medium particle in which it is located. Vibration, so that the perceived acoustic signal is transmitted to the piezoresistive sensitive unit, so that the stress of the beam changes, and the resistance value of the piezoresistor implanted on it changes. Through the metal wire and the corresponding circuit signal detection unit, it can be Realization of Vector Detection of Underwater Acoustic Signal

The principle of the hot wire MEMS vector hydrophone is different from that of the bionic MEMS piezoresistive vector hydrophone, and the bionic cilia are difficult to manufacture

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