Low-power working method of MEMS (micro-electromechanical system) metal oxide semiconductor gas sensor

A technology of oxide semiconductors and gas sensors, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of large performance attenuation, decreased sensitivity, difficult to accurately measure low-concentration harmful gases, etc., and achieve low power consumption and warm-up time short effect

Inactive Publication Date: 2017-05-31
武汉微纳传感技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the sensitivity of the gas sensor in this working mode is significantly lower than that in the continuous working mode, and the response recovery time is prolonged, making it difficult to accurately measure low-concentration harmful gases, and the more power consumption is reduced, the greater the performance degradation

Method used

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  • Low-power working method of MEMS (micro-electromechanical system) metal oxide semiconductor gas sensor

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Embodiment 1

[0030] combined with image 3 Describe this embodiment, the low power consumption working mode of a kind of MEMS metal oxide semiconductor gas sensor described in this embodiment, the specific implementation steps of this method are:

[0031] Step 1. According to the characteristics of the sensor, preheat the sensor at 300°C for 15 minutes in DC for the first time, make its sensitive resistance reach a stable state in a clean air state, and perform a baseline automatic calibration test;

[0032] Step 2. The sensor adopts low-frequency low-duty-cycle cycle heating standby, with DC heating at 300°C for 1 second per cycle, and the heating cycle is 100 seconds;

[0033] Step 3. Preheat the sensor at 300°C for 2 minutes at 300°C for a short time every 4 hours according to the specified cycle, and perform the baseline automatic calibration test after the preheating is completed;

[0034] Step 4: Enter the low-frequency low-duty cycle cycle heating standby again, and execute steps 2...

Embodiment 2

[0037] combined with image 3 Describe this embodiment, the low power consumption working mode of a kind of MEMS metal oxide semiconductor gas sensor described in this embodiment, the specific implementation steps of this method are:

[0038] Step 1. According to the characteristics of the sensor, preheat the sensor at 300°C for 10 minutes with high-frequency PWM (frequency 10kHz) for the first time, make its sensitive resistance reach a stable state in a clean air state, and perform a baseline automatic calibration test;

[0039] Step 2. The sensor adopts low-frequency low-duty-cycle cycle heating standby, and the high-frequency PWM (frequency is 10kHz) heats at 300°C for 1 second per cycle, and the heating cycle is once every 180 seconds;

[0040] Step 3. Preheat the sensor at 300°C for 1 minute with short-term high-frequency PWM (frequency 10kHz) every 3 hours according to the specified cycle, and perform the baseline automatic calibration test after the preheating is compl...

Embodiment 3

[0044] combined with Figure 4 Describe this embodiment, the low power consumption working mode of a kind of MEMS metal oxide semiconductor gas sensor described in this embodiment, the specific implementation steps of this method are:

[0045] Step 1. According to the characteristics of the sensor, preheat the sensor at 300°C for 15 minutes in DC for the first time, make its sensitive resistance reach a stable state in a clean air state, and perform a baseline automatic calibration test;

[0046] Step 2: The sensor adopts low-frequency low-duty cycle cycle heating standby, DC heating at 300°C for 1 second per cycle, low temperature heating at 40°C for 99 seconds, and a heating cycle of 100 seconds;

[0047] Step 3. Preheat the sensor at 300°C for a short period of time according to the specified cycle for 2 minutes. After the preheating is completed, perform the baseline automatic calibration test;

[0048] Step 4: Enter the low-frequency low-duty cycle cycle heating standby ...

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Abstract

The invention discloses a low-power working method of an MEMS (micro-electromechanical system) metal oxide semiconductor gas sensor, and relates to the technical field of application circuits of metal oxide semiconductor gas sensors. The low-power working method is characterized in that under the clean air state, the primary preheating is performed, so that a sensitive resistor of the sensor can reach the stable state, and the base line automatic calibration test is performed; the low-frequency and low-duty cycle heating standby is adopted between two times of harmful gas concentration test (including base line calibration test); before testing, the short-time preheating is performed and then the testing is executed according to requirements; after the short-time preheating is periodically performed, the base line automatic calibration test is performed. The MEMS metal oxide semiconductor gas sensor adopting the working method has the advantages that the problems of high power consumption and complicated calibration in the prior art are overcome, the required preheating time before sensor testing is short, and the base line is automatically calibrated without correction; the optimum property of the gas sensor can be fully realized, the low-concentration harmful gas can be measured, and the superlow power consumption meets the long-time application requirement of low-capacity batteries.

Description

technical field [0001] The invention relates to the technical field of a metal oxide semiconductor gas sensor application circuit, in particular to a MEMS (Micro-Electro-Mechanic System) metal oxide semiconductor gas sensor low-power working method. Background technique [0002] In addition to traditional gas leakage alarms and indoor air quality monitoring, the new MEMS metal oxide semiconductor gas sensors can also be used in portable inspection instruments, wearable devices, smart phones, etc. Typical metal-oxide-semiconductor gas sensors work at a temperature of 200-400°C. MEMS metal-oxide-semiconductor gas sensors achieve local high-temperature working conditions by using a temperature-isolated micro-hot plate, and the power consumption is about the same as that of traditional ceramic linings. One-tenth to one-hundredth of the sensor at the bottom, generally 10-80mW, which partially meets the power consumption requirements of portable devices for gas sensors. [0003] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/123G01N27/124
Inventor 雷鸣
Owner 武汉微纳传感技术有限公司
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