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Wavelength-tunable FP optical fiber filter based on MEMS and preparation method thereof

A technology of optical fiber filter and optical fiber collimator, which is applied in the field of sensing, can solve problems such as the inability to find a balance, and achieve the effects of batch production, lower driving voltage, and low cost

Active Publication Date: 2017-05-31
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the cavity length is only adjusted by static electricity, most of these MEMS F-P filters cannot find a balance between the cavity length and the driving voltage.

Method used

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  • Wavelength-tunable FP optical fiber filter based on MEMS and preparation method thereof
  • Wavelength-tunable FP optical fiber filter based on MEMS and preparation method thereof
  • Wavelength-tunable FP optical fiber filter based on MEMS and preparation method thereof

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Embodiment 1

[0083] see figure 1 , the present invention provides a kind of preparation method based on MEMS wavelength tunable FP optical fiber filter, described preparation method based on MEMS wavelength tunable FP optical fiber filter comprises the following steps:

[0084] 1) A semiconductor substrate is provided, the semiconductor substrate includes opposite first surfaces and second surfaces, a first groove and a second groove are formed on the first surface of the semiconductor substrate, and the second groove is located on the the outer side of the first groove and is spaced apart from the first groove;

[0085] 2) Provide a bonding substrate, the bonding substrate includes opposite first surfaces and second surfaces, a third groove is formed on the first surface of the bonding substrate; the first groove is located on the third In the region corresponding to the groove, the second groove is located outside the third groove and is spaced from the edge of the third groove;

[008...

Embodiment 2

[0128] read on Figure 13 and Figure 14 , the present invention also provides a MEMS-based wavelength tunable FP optical fiber filter, the MEMS-based wavelength tunable FP optical fiber filter is prepared by the preparation method described in Embodiment 1, and the MEMS-based wavelength tunable FP Optical fiber filter comprises: semiconductor substrate 10, and described semiconductor substrate 10 comprises opposite first surface and second surface; The through hole (being the through hole 108 described in embodiment one that is formed with up and down penetrating in described semiconductor substrate 10) ); the semiconductor substrate 10 is a ring structure; the bonding substrate 11, the bonding substrate 11 includes opposite first surfaces and second surfaces, the first surface of the bonding substrate 11 is formed with grooves (i.e. implementing The third groove 111 described in Example 1), the optical fiber installation hole 112 that passes through the groove up and down i...

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Abstract

The invention provides a wavelength-tunable FP optical fiber filter based on MEMS and preparation method thereof. The method comprises: (1) providing a semiconductor base and forming a first groove and a second groove on the first surface of the semiconductor base; (2) providing a bonding base and forming a third groove on the first surface of the bonding base; (3) bonding the semiconductor base and the bonding base; (4) forming an optical fiber mounting hole in the bonding base; (5) forming an optical anti-reflective film on the second surface of the semiconductor base; (6) etching the semiconductor base to form a through-hole through the semiconductor base;(7) forming a first electrode on the first surface of the bonding base of the bottom of the through-hole and forming a second electrode on the second surface of the bonding base; (8) releasing a movable mass block structure; (9) forming optics high-reflective film on the lower surface of center mass block. By presetting the optical fiber mounting hole, the driving voltage is reduced and the flexibility of the variation of the cavity length of the FP optical fiber filter and power options is increased extremely in electrostatic drive mode.

Description

technical field [0001] The invention belongs to the field of sensing technology, in particular to a MEMS-based wavelength tunable FP optical fiber filter and a preparation method thereof. Background technique [0002] Tunable optical fiber filter (TOFF) is a wavelength selective device, which has a wide range of applications in the field of optical fiber communication and optical fiber sensing: in the field of optical fiber communication, TOFF is used for reflective cavity mirror and narrowband filtering of semiconductor laser or fiber laser , multiplexer / demultiplexer, noise suppression in optical amplifiers, wavelength selectors, wavelength converters, dispersion compensators, and optical performance monitoring, etc.; in the field of fiber optic sensing, especially fiber gratings and wavelength Fabry-Pert In the field of optical fiber sensing, TOFF is the core component to realize wave division multiplexing and wavelength signal demodulation of optical fiber sensing networ...

Claims

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Application Information

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IPC IPC(8): G02B5/28G02F1/025
CPCG02B5/28G02F1/025
Inventor 郭智慧龙亮杨恒钟少龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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