1448 results about "Anti reflective" patented technology

The present invention provides an anti-reflective Si-Rich Silicon oxynitride (SiON) etch barrier layer and two compatible oxide etch processes. The Si-Rich Silicon oxynitride (SiON) etch barrier layer can be used as a hard mask in a dual damascene structure and as a hard mask for over a polysilicone gate. The invention has the following key elements: 1) Si rich Silicon oxynitride (SiON) ARC layer, 2) Special Silicon oxide Etch process that has a high selectivity of Si-Rich SiON to silicon oxide or SiN; 3) Special Si Rich SiON spacer process for a self aligned contact (SAC).A dual damascene structure is formed by depositing a first dielectric layer. A novel anti-reflective Si-Rich Silicon oxynitride (SiON) etch barrier layer is deposited on top of the first dielectric layer. A first opening is etched in the first insulating layer. A second dielectric layer is deposited on the anti-reflective Si-Rich Silicon oxynitride (SiON) etch barrier layer. A second dual damascene opening is etched into the dielectric layers. The anti-reflective Si-Rich Silicon oxynnitride (SiON) etch barrier layer can also serve as an ARC layer during these operations to reduce the amount of reflectance from conductive region to reduce distortion of the photoresist pattern.

A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

Sunlight can damage a conventional touch screen display and cause the display to be quite difficult to read. Furthermore, conventional touch screen displays are easily damaged, and, once damaged, the entire touch screen is replaced. To address these concerns, a touch panel includes anti-reflective coatings on the surfaces of the top plate and the base plate that are open to the air. These coatings substantially reduce reflections and make the touch screen easier to read in direct sunlight. In particular, the anti-reflective coating used on the upper surface of the base plate is dielectric in nature to reduce reflectivity even further. This dielectric coating includes openings to an underlying conductive layer so that an electrical contact is made when a user deflects the top plate into the base plate. Also, the top plate may be detachably coupled to the base plate, advantageously by double stick adhesive tape, so that only the top plate is replaced when damaged. In one embodiment, the top plate is placed in tension within a frame to prevent wrinkling. Furthermore, a resistive voltage divider may be fabricated on the base plate. The resistive voltage divider may include a substantially continuous strip of resistive material disposed on the conductive layer of the base plate, and a plurality of conductive traces disposed on the dielectric layer of the base plate and coupled to the resistive material in selected locations.