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Non-contact type measurement device and measurement method for movement flatness of motor displacement platform

A displacement platform, non-contact technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problem that the accuracy cannot meet high-precision measurement, etc., and achieve the effect of low cost and simple operation

Active Publication Date: 2017-06-13
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0002] In recent years, with the continuous development of science and technology, in high-precision machinery manufacturing and processing, high-precision optical and electronic component manufacturing, high-precision optical measurement, high-precision 3D printing manufacturing, and semiconductor manufacturing industries, the requirements for precision are increasing. The higher, and in the precision manufacturing and processing of these fields, the motor displacement platform is a very commonly used processing platform. Therefore, the error measurement and elimination of the motion flatness of the motor displacement platform itself has become increasingly urgent. The currently used dial indicator measurement method is contact measurement, and its accuracy is far from meeting the needs of high-precision measurement. This invention proposes a non-contact measurement device and measurement method for the smoothness of the motor displacement platform. The measurement accuracy High, more than 100nm, with high application value

Method used

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  • Non-contact type measurement device and measurement method for movement flatness of motor displacement platform
  • Non-contact type measurement device and measurement method for movement flatness of motor displacement platform

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Embodiment 1

[0060] A non-contact measuring device for the smoothness of a motor displacement platform, including a computer 1, a controller 2, a laser 3, a beam expander and collimator 4, a 1 / 2 wave plate 5, a four-quadrant detector 6, and an astigmatic lens 7 , polarization beam splitter prism 8, 1 / 4 wave plate 9, mirror 10, focusing objective lens 11, piezoelectric ceramic 12, aluminum film sample 13, two-dimensional motor displacement platform 14: as figure 1 As shown, the laser 3 emits red light with a wavelength of 658nm, which becomes parallel light through the beam expander collimator 4, then passes through the 1 / 2 wave plate 5, the polarization beam splitter 8, the 1 / 4 wave plate 9, and passes through the mirror 10 is incident on the focusing objective lens 11 after reflection, and finally focused on the reflective sample 13. The laser light is reflected by the reflective sample 13 , returns along the optical path, is reflected by the polarization beam splitter prism 8 , and conve...

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Abstract

The invention provides a non-contact type measurement device and measurement method for movement flatness of motor displacement platform. The measurement includes the construction of an automatic focusing optical path, the implementation of an automatic detection algorithm, the measurement of the movement flatness of a motor displacement platform and the recording and fitting of data. The automatic focusing optical path is constructed through laser, a four-quadrant detector and a astigmatic lens and automatic detection is realized through algorithm programming. When the motor displacement platform starts to move, the automatic detection system detects the vertical vibration amplitudes of the motor platform during the movement process and records and draws the vibration amplitudes of the displacement platform at different positions. The device and method are simple and practical in use and convenient to operate. Measurement of the movement flatness of the motor displacement platform is realized in a non-contact manner and the invention has a comparatively high application value.

Description

technical field [0001] The invention relates to the measurement of the motion flatness of a motor displacement platform, and relates to a non-contact measuring device and a measurement method for the motion flatness of a motor displacement platform. Background technique [0002] In recent years, with the continuous development of science and technology, in high-precision machinery manufacturing and processing, high-precision optical and electronic component manufacturing, high-precision optical measurement, high-precision 3D printing manufacturing, and semiconductor manufacturing industries, the requirements for precision are increasing. The higher, and in the precision manufacturing and processing of these fields, the motor displacement platform is a very commonly used processing platform. Therefore, the error measurement and elimination of the motion flatness of the motor displacement platform itself has become increasingly urgent. The currently used dial indicator measure...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/30
Inventor 白震梁鑫魏劲松
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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