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A lens fixing structure

A technology for fixing structures and lenses, applied in instruments, installations, optics, etc., to solve the problems of insensitive adjustment, incompatibility, and inability to achieve

Active Publication Date: 2020-11-20
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, V-shaped grooves 22 are designed around the lens 21, which cannot be realized under many working conditions and are not universal.
Since the component force of the self-weight of the lens 21 exists in the radial direction of the lens 21, this structure cannot avoid squeezing the lens 21 in the radial direction, resulting in a change in surface shape, and this structure is not sensitive to the adjustment of the radial force direction

Method used

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  • A lens fixing structure
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Experimental program
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Effect test

Embodiment 1

[0029] like image 3 and 4 As shown, the lens fixing structure of the present invention includes a lens 102 , a lens holder 103 , an elastic component 101 and a pressure ring 104 . The elastic part 101 is provided with a through hole for accommodating the lens 102, and the elastic part 101 can change elastically along the radial direction of the through hole, such as Figure 5 Shown; In the present embodiment, the elastic member 101 is in the shape of a truncated cone, and the outer diameter of the upper surface of the truncated cone is greater than the outer diameter of the lower surface, such as Image 6 As shown; the inner wall of the mirror holder 103 has an inclination angle, so that when the elastic member 101 is inserted between the lens 102 and the mirror holder 103, the outer wall of the elastic member 101 is closely attached to the inner wall of the mirror holder 103; A boss 105 is provided on which the pressure ring 104 is placed. The side wall of the boss 105 is ...

Embodiment 2

[0035] When the lens 102 changes along the radial direction of the lens 103 due to uneven heating, thereby causing the surface shape of the lens 102 to change, different forces can be applied at different positions of the elastic member 101 to improve the surface shape. like Figure 7 As shown, in this embodiment, four forces f1 , f2 , f3 , f4 are evenly distributed along the circumferential direction on the upper surface of the elastic member 101 as an example for illustration. Before the force is applied, due to the uneven heating of the lens 102, the lens 102 expands, so that the surface shape of the lens 102 is relatively large, and the surface shape is 25nm, such as Figure 8 shown. By adjusting the size of f1-f4, the expansion of the lens 102 in the radial direction is restrained, thereby improving the surface accuracy of the lens 102, and the improved effect is as follows Figure 9 As shown, the surface type reaches 7nm.

[0036] The lens fixing structure proposed by...

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Abstract

The present invention proposes a lens fixing structure, which fixes the lens in the lens holder, and the fixing structure includes an elastic component, and a through hole for accommodating the lens is arranged in the elastic component, and the elastic component can move along the The radial elasticity of the through hole changes, and the elastic component is clamped between the lens and the lens seat to limit the movement of the lens. Compared with the prior art, the lens fixing structure proposed by the present invention can ensure that there is no gap in the lateral direction of the lens, and at the same time can well control the fixing pressure of the lens, can offset the influence of the thermal deformation of the lens on the pressure, and can completely replace the existing The glue used to fix the lens in technology. At the same time, because the contact area between the structure of the present invention and the lens is relatively large, the long-term use is relatively stable, and it is more reliable than fixing the lens with glue, and because the integration is relatively simple, assembly time can be saved.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, and in particular to a radial fixing structure for lenses of a lithography exposure optical system. Background technique [0002] The requirements for the resolution of the projection optical system in the exposure equipment of the lithography machine are getting higher and higher, and the requirements for the imaging quality of the optical system are also higher. Changes in the operating environment of the optical system, such as air pressure, external vibration, etc., often cause changes in image quality; the thermal effect of high-power light sources also causes high-order aberrations in the lens, and the impact of lens fixing stress must be considered in high-precision optical systems . [0003] figure 1 The lens fixing form shown is a commonly used fixing structure. The lens 12 is placed in the lens barrel 11 through the pressure ring 13, but there is a gap between...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/00G02B7/02
CPCG02B7/00G02B7/022G02B7/026
Inventor 陈宇环
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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