Ion source discharge module and working method thereof

Abstract

The invention provides an ion source discharging module and an operating method thereof. The ion source discharging module comprises: a ceramic tube including a part with a larger outer diameter and a part with a smaller outer diameter; a metal member disposed on the periphery of the part with a smaller outer diameter and connected with the part with a larger outer diameter of the ceramic tube; a glass tube which is disposed on the periphery of the part with a smaller outer diameter, the left of which is connected with the metal member and the right of which is connected with a quartz tube, wherein the distance between the metal member and the outer edge of the part with a smaller outer diameter and the distance between the glass tube and the outer edge of the part with a smaller outer diameter are both greater than zero; and the quartz tube comprising a part with a larger inner diameter and a part with a smaller inner diameter, wherein the end portion of the part with a larger inner diameter is connected to the right of the glass tube, and the distance between the quartz tube and the part with a smaller outer diameter is greater than zero. The ion source discharging module has good reliability and simple structure.

Description

technical field [0001] The invention relates to an ion source, in particular to an ion source discharge module and a working method thereof. Background technique [0002] The ceramic parts in the ion source discharge module and the quartz glass tube need to be sealed and assembled to prevent the discharge rare gas from leaking to the outer surface of the quartz glass tube when passing through the ceramic part, so as to avoid direct discharge with the high-voltage electrode, resulting in unexpected loss of gas and energy. Ultimately, the ion beam intensity is insufficient and the stability becomes poor. At present, the solved technologies mainly include: [0003] 1. High-temperature adhesive packaging technology: The requirements for the gel-like process are very high, and the stress concentration of different materials at ultra-high temperatures (about 700 degrees Celsius) needs to be considered. [0004] 2. One-time sealing technology: materials with similar thermal expan...

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Problems solved by technology

[0004] 2. One-time sealing technology: materials with similar thermal expansion coefficients are used, but the thermal expansion coefficients of ceramics and quartz glass differ by an order of magnitude, and cannot be effectively solved in high-temperature environments.

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