The invention provides an
ion source discharging module and an operating method thereof. The
ion source discharging module comprises: a
ceramic tube including a part with a larger outer
diameter and a part with a smaller outer
diameter; a
metal member disposed on the periphery of the part with a smaller outer
diameter and connected with the part with a larger outer diameter of the
ceramic tube; a
glass tube which is disposed on the periphery of the part with a smaller outer diameter, the left of which is connected with the
metal member and the right of which is connected with a
quartz tube, wherein the distance between the
metal member and the outer edge of the part with a smaller outer diameter and the distance between the
glass tube and the outer edge of the part with a smaller outer diameter are both greater than zero; and the
quartz tube comprising a part with a larger inner diameter and a part with a smaller inner diameter, wherein the end portion of the part with a larger inner diameter is connected to the right of the
glass tube, and the distance between the
quartz tube and the part with a smaller outer diameter is greater than zero. The
ion source discharging module has good reliability and simple structure.