Automatic laser scanning galvanometer correction equipment and laser galvanometer equipment

Abstract

The invention provides automatic laser scanning galvanometer correcting equipment and laser galvanometer equipment. The correcting equipment comprises a control box, a scanning head, stepping motor control modules, photoelectric sensors, two guide rails, conveying belts and sensitive paper, wherein the two guide rails are arranged in parallel. The control box is connected with the scanning head, the stepping motor control modules and the photoelectric sensors. Each stepping motor control module is arranged on the corresponding guide rail and used for driving the corresponding conveying belt to move. Under control of the control box, the scanning head can be driven by the stepping motor control modules and the conveying belts to move along the guide rails in the axial direction. The sensitive paper is arranged between the two parallel guide rails. Each photoelectric sensor is arranged at the starting end of the corresponding guide rail. According to the automatic laser scanning galvanometer correcting equipment and the laser galvanometer equipment, a corrected figure is obtained in a linear-scanning manner; the obtained corrected figure is distortionless, rich in feature points, precise in correction and small in error; the mode that the guide rails are combined with the scanning head is adopted, so that an obtained image is large in view field; and the large-format laser galvanometer machining equipment can be corrected, and the structure of original laser machining equipment does not need to be changed.

Description

technical field

[0001] The invention belongs to the field of laser processing, and more specifically relates to an automatic laser scanning vibrating mirror correction device and a laser vibrating mirror device. Background technique

[0002] Galvanometer scanning is widely used in the laser processing industry, but due to the inherent image distortion in the galvanometer scanning method, it is necessary to perform galvanometer calibration before processing. In the prior art, the correction method is mainly to draw a specified special grid pattern on the photosensitive paper through the correction software, and then directly measure the coordinates of the grid points manually, or manually adjust the position of the point sensor to obtain the coordinate position. Since this correction method relies on manual visual inspection, it has great uncertainty and has a great influence on the machining accuracy. In addition to the traditional correction method, there is also a method ...

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