A water cooling core tube used for an electrode of a semiconductor-grade silicon single-crystal furnace and applications thereof
A silicon single crystal and semiconductor technology, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve problems such as high temperature and insufficient cooling, and achieve the effects of improving heat absorption efficiency, compact structure, and convenient use
Active Publication Date: 2017-06-30
南京晶能半导体科技有限公司
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[0005] The object of the present invention is to provide a new and reliable semiconductor Water-cooled core tube for electrode of silicon single crystal furnace
Method used
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[0017] The accompanying drawings disclose the specific structure of an embodiment involved in the present invention without limitation, and the present invention will be further described below in conjunction with the accompanying drawings.
[0018] Depend on figure 1 and figure 2 It can be seen that the water-cooled core tube involved in the present invention includes a small water-cooled tube 1, a variable diameter ring 2, a large water-cooled tube 3, a mounting seat 4 and a diverter block 5, and the center of the mounting seat 4 is a water inlet 6, wherein: the large water-cooling tube 3 and the installation The seat 4 is seamlessly welded, the water inlet 6 is located in the center of the large water-cooled pipe 3, the large water-cooled pipe 3 and the small water-cooled pipe 1 are seamlessly welded through the reducing ring 2, the end of the small water-cooled pipe 1 is sealed, and the seal is provided with evenly distributed Water outlet, each water outlet is equipped...
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A water cooling core tube used for an electrode of a semiconductor-grade silicon single-crystal furnace is provided. The water cooling core tube includes a small water cooling tube, a diameter variable ring, a large water cooling tube, a mounting base and stream separating blocks. The water cooling core tube is characterized in that the small water cooling tube, the diameter variable ring, the large water cooling tube and the mounting base are mounted in order through locating and fixing ports and then welded in order, so as to form a main body of the water cooling core tube through series welding connection; the upper end surface of the small water cooling tube is provided with four water discharging notches; the four stream separating blocks are welded at the external peripheries of the four water discharging notches respectively; the inner bore of the mounting base is provided with a cone-shaped tube thread water inlet; the mounting base is provided with four mounting holes; the mounting holes are used for mounting an electrode bottom end surface; and the mounting base is also provided with a sealing slot used for mounting an O-shaped sealing ring playing a sealing function between the mounting base and the electrode bottom end surface. The water cooling core tube is advantageous in that a diameter variable structure is adopted; the water cooling core tube can penetrate into a core part of the electrode so that cooling is more sufficient; and the stream separating blocks are provided so that cooling effects are more obvious.
Description
technical field [0001] The invention relates to a water-cooled core tube for an electrode and its application, in particular to a water-cooled core tube for a semiconductor-grade silicon single crystal furnace electrode and its application. Background technique [0002] Monocrystalline silicon is a crystal with a basically complete lattice structure. It is a good semiconductor material with a purity of more than 99.9999999%. It can be used in the production of diode-level, rectifier-level, circuit-level and solar cell-level single crystal products. And deep processing and manufacturing, its follow-up products integrated circuits and semiconductor separation devices have been widely used in various fields, and also occupy an important position in military electronic equipment, in the new material the forefront of development. [0003] The semiconductor grade silicon single crystal furnace is an important crystal growth equipment in the single crystal silicon industry chain. ...
Claims
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IPC IPC(8): C30B15/14C30B29/06
CPCC30B15/14C30B29/06Y02P70/50
Inventor 吴春生潘清跃王程平
Owner 南京晶能半导体科技有限公司