Dual-beam super-resolution focusing method by utilizing meta-material lens

Abstract

The invention discloses a dual-beam super-resolution focusing method by utilizing a meta-material lens. A circular-subregion disc-type superlens and a circular-subregion optical filter are prepared, wherein the disc-type superlens and the optical filter each comprises a disc, an inner circular ring portion and an outer circular ring portion; the outer circular ring portions are respectively made of transparent substrate material; and the radius of each circular subregion of the optical filter and the number of the subregions are same with those of the circular-subregion superlens, and accurate coaxial alignment is realized, thereby realizing dual-beam super-resolution focusing. The method enables the circular-subregion meta-material lens and the circular subregion optical filter to be combined, and is used for dual-beam super-resolution photoetching, dual-beam super-resolution high-density optical data storage and dual-beam super-resolution fluorescence imaging. The method is high in integration level, small in size, thin in thickness and light in weight; and aberrations and chromatic aberrations can be better than those of existing high-quality objective lenses or a single free-form lens.

Description

technical field [0001] The present invention relates to the field of optics, in particular to a double-beam super-resolution focusing method using a metamaterial lens, a coaxial ring-shaped partitioned super-lens and a ring-shaped partitioned filter made by using the phase modulation characteristics of artificial microstructure metamaterials for incident light Super-resolution focusing method composed of slices. Background technique [0002] Focusing the laser beam through a high numerical aperture objective lens achieves a diffraction-limited minimum spot size of approximately half the wavelength. The resolution of the focused laser beam spot produced by the objective lens for excitation fluorescence imaging, optical data recording, lithography, and laser processing is also limited. Stefan Hell's dual-beam super-resolution fluorescence imaging technique, namely stimulated emission dissipation microscopy, utilizes two-beam super-resolution technology that simultaneously foc...

AI Technical Summary

Problems solved by technology

[0007] In order to overcome the defects that the above-mentioned dual-beam super-resolution focusing system consists of an objective lens with a large volume and size and an independently separated vortex phase plate, it is difficult to accurately correct aberrations and chromatic aberrations for dual-wavelength laser focusing, and it cannot be miniaturized to accommodate And to meet the needs of high-speed and accurate scanning, the present invention proposes the use of artificial microstructure nano-antennas for the precise phase modulation characteristics of incident light, and the nano-antenna arrays composed of ring-shaped partitions are made of ultra-lenses with very small volumes and sizes to cooperate with corresponding ring-shaped partitions. Circular filter realizes double-beam super-resolution focusing

Images