Dual-beam super-resolution focusing method by utilizing meta-material lens

A focusing method and double-beam technology, which is applied in the field of super-resolution focusing, can solve the problems of inability to miniaturize and the inability to accurately correct aberrations and chromatic aberrations in dual-wavelength laser focusing, and achieve the effect of improving resolution and imaging quality

Active Publication Date: 2017-07-07
唐山斯腾光电科技有限公司
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Problems solved by technology

[0007] In order to overcome the defects that the above-mentioned dual-beam super-resolution focusing system consists of an objective lens with a large volume and size and an independently separated vortex phase plate, it is difficult to accurately correct aberrations and chromatic aberrations for dual-wavelength laser focusing, and it cannot be miniaturized to accommodate And to meet the needs of high-speed a

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  • Dual-beam super-resolution focusing method by utilizing meta-material lens
  • Dual-beam super-resolution focusing method by utilizing meta-material lens
  • Dual-beam super-resolution focusing method by utilizing meta-material lens

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Embodiment 1

[0052]The specific implementation steps of a double-beam super-resolution focusing method using a metamaterial lens of the present invention are as follows:

[0053] (1) First make figure 1 Annular partition filter shown. where R 1 = 1 mm, R 2 = 1.5mm, R 3 = 2 mm. Wherein the disc-shaped optical filter 103 has a bandwidth range of 100nm, and the wavelength range includes 375nm. The band bandwidth of the inner circular optical filter 102 is above 150nm, and the band includes 633nm.

[0054] (2) Determine the focal length f=1.5mm and the lens radius of the hyperlens, as attached figure 2 Shown (200), including R 1 = 1 mm, R 2 = 1.5mm, R 3 = 2mm. then by the formula Determine the generation wavelength λ 3 = Phase modulation value of 375nm spherical wave, φ 2 =atan2(y,x) determines the azimuth angle of each point, that is, the vortex phase value. then according to Calculation attached figure 2 Disc-shaped metalens 203 each The rotation angle of the vertical c...

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Abstract

The invention discloses a dual-beam super-resolution focusing method by utilizing a meta-material lens. A circular-subregion disc-type superlens and a circular-subregion optical filter are prepared, wherein the disc-type superlens and the optical filter each comprises a disc, an inner circular ring portion and an outer circular ring portion; the outer circular ring portions are respectively made of transparent substrate material; and the radius of each circular subregion of the optical filter and the number of the subregions are same with those of the circular-subregion superlens, and accurate coaxial alignment is realized, thereby realizing dual-beam super-resolution focusing. The method enables the circular-subregion meta-material lens and the circular subregion optical filter to be combined, and is used for dual-beam super-resolution photoetching, dual-beam super-resolution high-density optical data storage and dual-beam super-resolution fluorescence imaging. The method is high in integration level, small in size, thin in thickness and light in weight; and aberrations and chromatic aberrations can be better than those of existing high-quality objective lenses or a single free-form lens.

Description

technical field [0001] The present invention relates to the field of optics, in particular to a double-beam super-resolution focusing method using a metamaterial lens, a coaxial ring-shaped partitioned super-lens and a ring-shaped partitioned filter made by using the phase modulation characteristics of artificial microstructure metamaterials for incident light Super-resolution focusing method composed of slices. Background technique [0002] Focusing the laser beam through a high numerical aperture objective lens achieves a diffraction-limited minimum spot size of approximately half the wavelength. The resolution of the focused laser beam spot produced by the objective lens for excitation fluorescence imaging, optical data recording, lithography, and laser processing is also limited. Stefan Hell's dual-beam super-resolution fluorescence imaging technique, namely stimulated emission dissipation microscopy, utilizes two-beam super-resolution technology that simultaneously foc...

Claims

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Application Information

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IPC IPC(8): G02B27/58G02B1/00
Inventor 陈建农朱林伟李志刚徐钦峰
Owner 唐山斯腾光电科技有限公司
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