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Splicing objective lens temperature control device and splicing objective lens temperature control method

A technology of temperature control device and objective lens, which is applied in the direction of photo-plate-making process exposure device, photo-plate-making process of pattern surface, micro-lithography exposure equipment, etc., to achieve the effect of ensuring uniformity, simple control structure and simple structure

Active Publication Date: 2018-10-16
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The object of the present invention is to provide a splicing objective lens temperature control device and a splicing objective lens temperature control method to solve the temperature uniformity problem of simultaneous temperature control of multiple objective lenses in a compact space

Method used

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  • Splicing objective lens temperature control device and splicing objective lens temperature control method
  • Splicing objective lens temperature control device and splicing objective lens temperature control method
  • Splicing objective lens temperature control device and splicing objective lens temperature control method

Examples

Experimental program
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Embodiment 1

[0039] refer to figure 2 , figure 2 It is a structural schematic diagram of the spliced ​​objective lens temperature control device according to Embodiment 1 of the present invention. Such as figure 2 As shown, the spliced ​​objective lens of this embodiment includes four sets of objective lenses, wherein each set of objective lenses includes an upper objective lens and a lower objective lens connected to each other by an optical path. In addition, it can be understood that: both the upper objective lens and the lower objective lens include a lens barrel. In addition, it should be noted that the splicing objective lens of the present invention includes but is not limited to four groups of objective lenses, but at least includes one group of objective lenses. Here, this embodiment is only illustrated with four groups of objective lenses, but it cannot be used as a reference for this invention. As a limitation of the invention, in specific applications, the number of the s...

Embodiment 2

[0056] Embodiment 2 is different from Embodiment 1 in that the spliced ​​objective lens of this embodiment includes six groups of objective lenses, and the six groups of objective lenses are further divided into two groups of objective lenses, one of which includes four groups of objective lenses, and the other group of objective lenses includes Two groups of objective lenses, each group of objective lenses includes upper and lower objective lenses connected to each other in optical paths, and at the same time, each objective lens group shares a water jacket, and the splicing temperature control device of this embodiment includes a plurality of upper heaters and lower heaters, specifically , see image 3 , image 3 It is a structural schematic diagram of the spliced ​​objective lens temperature control device according to the second embodiment of the present invention.

[0057] Such as image 3 As shown, the splicing objective lens temperature control device of this embodime...

Embodiment 3

[0080] refer to figure 2 , this embodiment also provides a splicing objective lens temperature control method, which uses the splicing objective lens temperature control device described in Embodiment 1, and includes: when performing temperature control, the circulating water hole unit 320 is controlled according to the upper temperature sensor 341 and the temperature detection results of the lower temperature sensor 342 control the heating temperature of the lower heater 350 to compensate the temperature of the lower objective lens in the four groups of objective lenses 400 to ensure the temperature uniformity of the upper and lower objective lenses.

[0081] Optionally, when the splicing objective lens temperature control device also includes at least one upper heater arranged on the upper water inlet pipe 331, the splicing objective lens temperature control method also includes:

[0082] When temperature control is carried out, if the temperature detected by the upper temp...

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PUM

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Abstract

The invention provides a temperature control device of a splicing objective lens and a temperature control method of the splicing objective lens. The splicing objective lens comprises at least one group of objective lenses, wherein the group of objective lenses comprise an upper objective lens and a lower objective lens which are in light path connection. The temperature control device of the splicing objective lens comprises a water sleeve, an upper water inlet pipe, a lower water inlet pipe, an upper water outlet pipe, a lower water outlet pipe, a water circulation water control unit, an upper temperature sensor, a lower temperature sensor and at least one lower heater, wherein the upper objective lens and the lower objective lens are arranged in the water sleeve, the upper water inlet pipe and the upper water outlet pipe are arranged at the upper objective lens, the lower water inlet pipe and the lower water outlet pipe are arranged at the lower objective lens, the circulation water control unit communicates the upper water inlet pipe, the lower water inlet pipe, the upper water outlet pipe and the lower water outlet pipe, the upper temperature sensor and the lower temperature sensor are respectively near to the upper objective lens and the lower objective lens, at least one lower heater is arranged on the lower water inlet pipe so as to heat circulation cooling water in the lower water inlet pipe by the heater, the temperatures of the upper objective lens and the lower objective lens are balanced and the integral temperature control uniformity is ensured.

Description

technical field [0001] The invention relates to the field of temperature control of components, in particular to a splicing objective lens temperature control device and a splicing objective lens temperature control method. Background technique [0002] Lithography machine is the core equipment of large-scale and VLSI manufacturing, which includes exposure system, workpiece table, mask table, silicon wafer transmission system, workpiece transmission system, micro-environment system and other sub-systems. Among them, the exposure system and the microenvironment system are the key systems to ensure the quality of the exposure lines of the lithography machine, and the temperature control of the projection objective lens of the lithography machine is the key. [0003] The lithography machine has extremely high requirements on the internal environment of the projection objective lens, especially the requirements on temperature stability and uniformity. Since laser exposure is pe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/70891
Inventor 罗兵
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD