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Evaporation device

A technology of evaporation and evaporation source, which is applied in the field of organic light-emitting display, can solve the problem of low yield rate of the substrate to be evaporated, and achieve the effect of firm positioning

Active Publication Date: 2018-12-14
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Based on this, it is necessary to solve the problem that the above-mentioned mask plate sags to a certain extent relative to the substrate to be evaporated due to its own weight, thereby causing the evaporation device to have a low yield rate of the substrate to be evaporated. Evaporation device for positioning

Method used

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0025] It should be noted that when an element is referred to as being “disposed on” another element, it may be directly on the other element or there may also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only and are not intended to represent the only embodiments.

[0026] Unless otherwise defined, all technical and scientific ter...

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Abstract

The invention relates to an evaporation device for preparing an organic light-emitting display device, comprising: an evaporation chamber; an evaporation source arranged in the evaporation chamber, used for evaporation on the surface of the substrate to be evaporated ; The magnetic fixed plate that is set for the evaporation source, the magnetic fixed plate has a first surface that is a convex surface; the mask plate that can be magnetically adsorbed on the first surface of the magnetic fixed plate is used to cooperate The magnetic fixing plate clamps the substrate to be evaporated between the mask plate and the magnetic fixing plate. The magnetic fixing plate of the above-mentioned vapor deposition device can have a first surface with a convex structure, which can firmly adsorb the above-mentioned mask plate on its surface, and then clamp the flexible material substrate between the magnetic fixing plate and the mask plate, the above-mentioned The first surface has a convex structure, which prevents the position close to the center of the mask from sagging due to its own gravity.

Description

technical field [0001] The invention relates to the field of organic light-emitting displays, in particular to an evaporation device. Background technique [0002] Organic Light Emitting Diode (OLED) is an organic thin-film electroluminescent device, which has the advantages of easy formation of flexible structure and wide viewing angle; therefore, the display technology using OLED has become an important display technology. technology. [0003] The full-color display of OLED generally includes R (red) G (green) B (blue) sub-pixels to emit light independently, or a white light OLED combined with a color filter film. Among them, the independent light emission of RGB sub-pixels is currently the most widely used color mode, which utilizes the organic light-emitting materials in the sub-pixel units to emit light independently. [0004] At present, the organic luminescent material layer is generally formed by vacuum evaporation on the surface of the substrate to be evaporated. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56C23C14/24C23C14/12C23C14/56C23C14/04
CPCC23C14/0021C23C14/042C23C14/12C23C14/24C23C14/56H10K71/164H10K71/166
Inventor 李鹏
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD