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An integrated hyperlens infrared detector prototype device, method of manufacture and apparatus

This invention provides a prototype infrared detector with integrated metalens, its fabrication method, and an optoelectronic instrument. The prototype infrared detector with integrated metalens, its fabrication method, and the optoelectronic instrument of this invention offer an effective and feasible solution for the industrialization of infrared detectors with integrated metalens, and are beneficial to the development of optoelectronic devices. The prototype infrared detector with integrated metalens of this invention has the advantages of miniaturization and high performance, and is expected to be widely used in scenarios such as integrated miniaturized infrared detection and infrared detection in low-light environments.
Owner:INSTITUTE OF PHYSICS CHINESE ACADEMY OF SCIENCES