Ultraviolet photoresponse device based on homogeneous ZnO nano core shell array and manufacturing method

Abstract

The invention discloses an ultraviolet photoresponse device based on a homogeneous ZnO nano core shell array. The homogeneous ZnO nano core shell array layer is arranged between a glass substrate and a transparent contact electrode. The transparent contact electrode is ITO conductive glass engraved with a 0.2cm channel. The ZnO nano core shell array is composed of a ZnO nano array seed layer, a ZnO nanorod array core layer growing on the surface of the ZnO nano array seed layer and a ZnO nano flake shell layer growing on the nanorod surface. The structure layer uses the ZnO nano array as a carrier, zinc acetate and hexamethylenetetramine are adopted as raw materials, a low-temperature aqueous solution is firstly adopted to grow the ZnO nanorod array on the ZnO surface, and low-temperature ethanol solvothermal is then adopted to grow the ZnO nano flake layer structure on the nanorod array. The manufacturing method is simple, the reaction temperature is low, and the manufactured product has excellent photoresponse to ultraviolet light.

Description

technical field [0001] The invention relates to a semiconductor material. Background technique [0002] As an important wide-bandgap semiconductor material, zinc oxide material has excellent optical and electrical properties, and the ordered zinc oxide nanoarray has high specific surface area and fast electron transport ability, and it is non-toxic, raw material The cost is low and the growing method is simple. Therefore, it has become a popular material for light-emitting diodes and ultraviolet detectors in recent years, and has good application potential. [0003] The reported ZnO nanostructures are rich and colorful, mainly focusing on the research of one-dimensional vertical arrays. The ultraviolet detector nanowire arrays based on ZnO nanoarrays have a large specific surface area and can provide fast directional transport channels for carriers in recent years. to get more and more attention. How to further improve its performance has always been a research hotspot. T...

AI Technical Summary

Problems solved by technology

How to further improve its performance has always been a research hotspot. The performance of ultraviolet detectors based on one-dimensional ZnO nanomaterials needs to be further improved. At present, most of the existing methods focus on surface noble metal modification, which is complicated in process and high in cost.

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