Two-source controllable SiO production system and production method

A production system and electric control cabinet technology, applied in chemical instruments and methods, inorganic chemistry, non-metallic elements, etc., can solve the problems of low production efficiency of SiO production system, achieve accurate and controllable product quality, increase heating rate, and quality rising effect

Active Publication Date: 2017-07-21
合肥科晶材料技术有限公司
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Problems solved by technology

[0003] A two-source controllable SiO production system proposed by the present invention can solve the technical problem of low production efficiency of the traditional SiO production system

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  • Two-source controllable SiO production system and production method

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with accompanying drawing:

[0023] Such as figure 1 As shown, a two-source controllable SiO production system in this embodiment is mainly composed of a double-crucible induction heating part, a stainless steel vacuum chamber, a sample collection rod set with water cooling and electrostatic collection, and an electric control cabinet system.

[0024] It specifically includes a double-crucible induction heating part and an electrostatic collection device 3, the double-crucible induction heating part is arranged in a stainless steel vacuum chamber 5, the double-crucible induction heating part includes a double-crucible induction heating coil 2, and the double-crucible induction heating coil 2 is two An independent evaporation crucible, two induction heating coils 2 are respectively arranged on the outside of the evaporation crucible, the electrostatic collection device 3 includes a collection tube and a...

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Abstract

Provided are a two-source controllable SiO production system and a production method. The technical problem of low production efficiency of a traditional SiO production system can be solved. The two-source controllable SiO production system comprises a double-crucible sending heating part and a static collecting device, wherein the double-crucible sending heating part is arranged in a stainless steel vacuum cavity and comprises double crucibles and two sensing heating coils, and the two sensing heating coils are arranged outside the double crucibles respectively. The static collecting device comprises a collecting pipe and a collecting rod, wherein the inside of the collecting pipe is a static metal collecting cavity, the collecting rod is arranged in the collecting pipe, and the collecting pipe is arranged above the stainless steel vacuum cavity and communicated with the inside of the stainless steel vacuum cavity. The two-source controllable SiO production system further comprises an electric control cabinet, wherein the electric control cabinet is connected with the sensing heating coils. The two-source controllable SiO production system adopts two-source control and can accurately control reaction conditions, a silicon monoxide production period can be shortened, energy consumption can be reduced, large-scale silicon monoxide production can be achieved, and the exploratory research requirements of the scientific research institutions can be also met.

Description

technical field [0001] The invention relates to the field of vacuum equipment manufacturing, in particular to a two-source controllable SiO production system and production method. Background technique [0002] Most of the existing domestic vacuum furnaces used for silicon monoxide production are production furnaces with a single crucible source, and most of them use SiO 2 After being mixed with Si powder, it is evaporated by controlling the temperature of an evaporation source. The production process is not precise enough, and the quality of the produced silicon monoxide is difficult to guarantee, which cannot meet the needs of modern production. On the other hand, the heating system usually uses resistance wire, molybdenum wire, etc. for heating, and the heating rate is slow, which cannot realize rapid production and cannot meet the requirements of industrialization. At present, the vacuum furnace charging system for preparing silicon monoxide on the market adopts ordinar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/113
CPCC01B33/182Y02P20/10
Inventor 邾根祥安唐林朱沫浥娄晓峰
Owner 合肥科晶材料技术有限公司
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