Wavefront sensor with variable shear rate based on random coded mixed grating

A technology of wavefront sensors and hybrid gratings, applied in instruments, scientific instruments, measuring optics, etc., can solve problems such as the limitation of the diversity of detection objects, and achieve the effects of simple and flexible adjustment devices, flexible and flexible measurement, and strong generalization

Active Publication Date: 2017-07-28
HANGZHOU JINGNAIKE OPTOELECTRONICS TECH CO LTD
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AI Technical Summary

Problems solved by technology

For devices with an unadjustable distance between the randomly coded grating and the CCD, the diversity of detection objects is limited. Therefore, it is necessary to propose a wavefront sensor device capable of achieving any shear rate for more generalized high-precision wavefronts. detection

Method used

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  • Wavefront sensor with variable shear rate based on random coded mixed grating
  • Wavefront sensor with variable shear rate based on random coded mixed grating
  • Wavefront sensor with variable shear rate based on random coded mixed grating

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Embodiment

[0032] An example of the wavefront sensor of the present invention based on a random coded hybrid grating variable shear rate is described as follows.

[0033] For wavefront sensors with variable shear rates based on randomly coded hybrid gratings, different shear rates are required for wavefronts with different distortions to take into account both accuracy and sensitivity. For waves with large PV (Peak-to-Valley) A small shear rate is required to ensure accuracy, and a large shear rate can be appropriately selected to increase sensitivity for a wavefront with a small PV value. like Figure 9 Shown is the relationship between the detection error and the shear rate of the large distortion wavefront (PV=7.2603λ, RMS=1.7222λ). It can be seen that when the shear rate is greater than 0.1, the error increases. is so large that the sampling law cannot be satisfied. On the contrary as Figure 10 Shown is the relationship between detection error and shear rate of small distortion w...

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Abstract

The invention discloses a wavefront sensor with a variable shear rate based on a random coded mixed grating. The sensor comprises a random coded mixed grating composed of an amplitude grating and a phase grating, a CCD and a mechanical adjusting device. Four wavelets are generated by the diffraction of a wavefront to be detected through the grating, and a resulting four wavefront interferogram is received by the CCD. The technical characteristic of the invention is that the shear rate can be continuously changed with the distance between the grating and the CCD so that the wavefront sensor is more versatile. In the transverse shear interference, if the selected shear rate is low, the detection precision is high, but the sensitivity is low, and if the shear rate is too high, the precision is reduced. Therefore, to realize arbitrary shear rate selection in the detection is of great importance. The wavefront sensor of the invention is applied to the measurement of optical system aberration, spherical and aspherical surfaces and biological cell phase information. The wavefront sensor is based on the principle of common path transverse shear interference, with no additional reference optical path, has a strong anti-interference ability, good shock resistance and high stability, and can realize high precision detection in general environments.

Description

technical field [0001] The invention relates to a wavefront sensor with a variable shear rate based on a randomly coded hybrid grating, and mainly relates to the fields of optical wavefront detection and quantitative phase detection. Background technique [0002] Transverse shearing technology is based on the principle of common-path shearing interference, without additional reference optical path, strong anti-interference ability, good shock isolation effect, high stability, and can achieve high-precision detection in general detection environments. It is suitable for optical system image Difference, measurement of spherical, aspherical surface shape and phase information of biological cells. [0003] The traditional transverse shearing interferometer needs to collect two transverse shearing interferograms in strictly orthogonal directions to reconstruct the original wavefront. The structure of the optical path involved is more complicated, and the adjustment process is mor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/02
CPCG01J9/0215G01J2009/002Y02A90/10
Inventor 杨甬英曹频凌曈
Owner HANGZHOU JINGNAIKE OPTOELECTRONICS TECH CO LTD
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