Wavefront sensor with variable shear rate based on random coded mixed grating

Abstract

The invention discloses a wavefront sensor with a variable shear rate based on a random coded mixed grating. The sensor comprises a random coded mixed grating composed of an amplitude grating and a phase grating, a CCD and a mechanical adjusting device. Four wavelets are generated by the diffraction of a wavefront to be detected through the grating, and a resulting four wavefront interferogram is received by the CCD. The technical characteristic of the invention is that the shear rate can be continuously changed with the distance between the grating and the CCD so that the wavefront sensor is more versatile. In the transverse shear interference, if the selected shear rate is low, the detection precision is high, but the sensitivity is low, and if the shear rate is too high, the precision is reduced. Therefore, to realize arbitrary shear rate selection in the detection is of great importance. The wavefront sensor of the invention is applied to the measurement of optical system aberration, spherical and aspherical surfaces and biological cell phase information. The wavefront sensor is based on the principle of common path transverse shear interference, with no additional reference optical path, has a strong anti-interference ability, good shock resistance and high stability, and can realize high precision detection in general environments.

Description

technical field [0001] The invention relates to a wavefront sensor with a variable shear rate based on a randomly coded hybrid grating, and mainly relates to the fields of optical wavefront detection and quantitative phase detection. Background technique [0002] Transverse shearing technology is based on the principle of common-path shearing interference, without additional reference optical path, strong anti-interference ability, good shock isolation effect, high stability, and can achieve high-precision detection in general detection environments. It is suitable for optical system image Difference, measurement of spherical, aspherical surface shape and phase information of biological cells. [0003] The traditional transverse shearing interferometer needs to collect two transverse shearing interferograms in strictly orthogonal directions to reconstruct the original wavefront. The structure of the optical path involved is more complicated, and the adjustment process is mor...

AI Technical Summary

Problems solved by technology

For devices with an unadjustable distance between the randomly coded grating and the CCD, the diversity of detection objects is limited. Therefore, it is necessary to propose a wavefront sensor device capable of achieving any shear rate for more generalized high-precision wavefronts. detection

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