A kind of micro-actuator and its preparation method
A kind of actuator and miniature technology, which is applied in the direction of microstructure technology, microstructure device, microelectronic microstructure device, etc. It can solve the problems of single response type, failure to work, small deformation, etc.
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[0051] The present invention also provides a method for preparing the aforementioned micro-actuator, comprising the following steps:
[0052] Borax is mixed with carbamate-grafted polyvinyl alcohol aqueous solution to obtain borax slightly cross-linked carbamate-grafted polyvinyl alcohol aqueous solution;
[0053] A micro-actuator is obtained by coating the aqueous solution of polyvinyl alcohol grafted with carbamate slightly cross-linked by borax on the surface of the inert layer and then performing heat treatment.
[0054] The present invention firstly prepares an aqueous solution of carbamate-grafted polyvinyl alcohol, specifically, mixes carbamate-grafted polyvinyl alcohol with water, and stirs vigorously until dissolved to obtain carbamate-grafted polyvinyl alcohol aqueous solution. Wherein, the water is preferably deionized water.
[0055] Wherein, the mass concentration of the carbamate-grafted polyvinyl alcohol in the carbamate-grafted polyvinyl alcohol aqueous solut...
Embodiment 1
[0071] Polyvinyl alcohol, dimethyl sulfoxide and carbonyldiimidazole are mixed for an activation reaction to obtain activated polyvinyl alcohol, wherein the molar ratio of polyvinyl alcohol to carbonyldiimidazole is 1:0.5; the activation reaction The temperature is 20-30°C.
[0072] The activated polyvinyl alcohol with a molar ratio of 1:0.5 was reacted with N,N-diethyl-1,2-diamine for 100 hours to obtain carbamate-grafted polyvinyl alcohol.
[0073] Through testing, the measured grafting rate is 25%.
Embodiment 2
[0075] Take 50 mg of urethane-grafted polyvinyl alcohol (PVA-DEEDA) prepared in Example 1, add 5 milliliters of 18 megohm deionized water, stir vigorously at 10 degrees Celsius for 12 hours, and configure a mass fraction concentration of 1% amine The polyvinyl alcohol (PVA-DEEDA) aqueous solution of carbamate grafting; The above-mentioned PVA-DEEDA is divided into 5 parts, every part of 1 milliliter, add respectively 0 milligram, 1 milligram, 3 milligrams, 5 milligrams, 8 milligrams of borax (Na 2 B 4 o 7 10H 2 O), stirred at 10 degrees Celsius for 30 minutes. The above solutions are respectively named as PVA-DEEDA-0Borax (corresponding to the PVA-DEEDA aqueous solution without borax), PVA-DEEDA-1Borax (corresponding to the PVA-DEEDA aqueous solution adding 10% borax), PVA-DEEDA-3Borax (corresponding to adding 30% The PVA-DEEDA aqueous solution of borax), PVA-DEEDA-5Borax (corresponding to the PVA-DEEDA aqueous solution with 50% borax added) and PVA-DEEDA-8Borax (correspond...
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Abstract
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