Integrated optical fiber high pressure sensor and manufacturing method thereof

Abstract

The invention discloses an integrated optical fiber high pressure sensor and a manufacturing method thereof. The integrated optical fiber high pressure sensor comprises a sensing unit, a glass capillary tube, a sensor body, welding points, a shell and a Fabry-Perot cavity, and is characterized in that the sensing unit is composed of a pressure sensing diaphragm, a glass substrate and a transmission optical fiber; the upper surface of the glass substrate is provided with a microcavity at the middle part through corrosion, the bottom of the microcavity acts as a first reflecting surface of the Fabry-Perot cavity, and the corrosion depth of the microcavity determines the initial length of the Fabry-Perot cavity; the glass substrate and the sensor body are connected together in an anode bonding mode; the glass capillary tube is attached to the bottom surface of the glass substrate; the sensor body and the shell are connected into an integral whole so as to provided protection for the sensing unit; and the transmission optical fiber is inserted from a bottom hole of the glass capillary tube and fixed, and the upper end face of the transmission optical fiber is attached to the bottom surface of the glass substrate. The sensor disclosed by the invention can avoid a defect of glued packaging of traditional optical fiber Fabry-Perot sensors, has a wider measuring range and can measure higher pressure.

Description

technical field [0001] The invention relates to the field of optical fiber sensing, in particular to an integrated optical fiber high pressure sensor and a manufacturing method thereof. The sensor can be used to detect relative pressure and absolute pressure of liquid and gas. Background technique [0002] Optical fiber Fabry-Perot pressure sensor is a kind of optical fiber pressure sensor. It usually consists of an optical fiber end face and a diaphragm end face to form a Fabry-Perot microresonator cavity. When the pressure acts on the diaphragm, the diaphragm will be deformed. , so that the length of the Fappel cavity changes, so as to realize the sensing. Some designs have been proposed in recent years, such as Don C.Abeysinghe and others in 2001 (DonC.Abeysinghe, Samhita Dasgupta, Joseph T.Boyd, Howard E.Jackson, A Novel MEMSpressure sensor fabricated on an optical fiber, IEEE Photonics Technology Letters, 2001, 13(9):993-995) etched microcavities on the end faces of mu...

AI Technical Summary

Problems solved by technology

However, at present, most diaphragm optical fiber Fabry-Perot sensors have a narrow range, and the limit pressure range that can be measured is also low. There is no optical fiber Fabry-Perot pressure sensor that can be used for pressure measurement above 80Mpa on the market.

At the same time, most of the current diaphragm optical fiber Fabry-Perot sensors use quartz, Pyrex glass, silicon wafers and other materials. Unfavorable characteristics

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